The high-speed impact of liquid microdroplets has emerged as a promising method to eliminate nanoparticle contaminants from semiconductor wafer surfaces. However, existing experimental studies have...

中文翻译：

---

液滴通过高速微滴冲击去除硅晶片上纳米颗粒污染物的能力和效率

液体微滴的高速冲击已成为消除半导体晶圆表面纳米颗粒污染物的一种有前途的方法。然而，现有的实验研究...