A novel patterning method achieves two-dimensional nano-patterning of metal nanofibers by depositing a platinum–cerium alloy film on a silicon wafer and inducing phase separation in an oxygen–carbon monoxide atmosphere. The resulting nano-patterned thin film, Pt#CeO₂/Si, consists of platinum and cerium oxide with an average pattern width of 50 nm and exhibits potential as a hydrogen sensor with sensitive electrical responses to hydrogen ad/desorption. The patterning method introduced herein addresses the challenge of wavelength limitations in traditional optical lithography, offering a scalable approach for sub-50 nm patterns, which are crucial for advanced sensor and electronic applications.

中文翻译：

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通过纳米相分离对合金薄膜进行低于 50 nm 的图案化，用于氢气传感

一种新颖的图案化方法通过在硅晶片上沉积铂-铈合金薄膜并在氧-一氧化碳气氛中诱导相分离来实现金属纳米纤维的二维纳米图案化。所得纳米图案薄膜Pt#CeO ₂ /Si由铂和氧化铈组成，平均图案宽度为50 nm，具有作为氢传感器的潜力，对氢吸附/解吸具有灵敏的电响应。本文介绍的图案化方法解决了传统光学光刻中波长限制的挑战，为 50 nm 以下图案提供了可扩展的方法，这对于先进传感器和电子应用至关重要。