A novel emissive probe consisting of an oxide cathode coating is developed to achieve a low operating temperature and long service life. The properties of the novel emissive probe are investigated in detail, in comparison with a traditional tungsten emissive probe, including the operating temperature, the electron emission capability and the plasma potential measurement. Studies of the operating temperature and electron emission capability show that the tungsten emissive probe usually works at a temperature of 1800 K–2200 K while the oxide cathode emissive probe can function at about 1200 K–1400 K. In addition, plasma potential measurements using the oxide cathode emissive probe with different techniques have been accomplished in microwave electron cyclotron resonance plasmas with different discharge powers. It is found that a reliable plasma potential can be obtained using the improved inflection point method and the hot probe with zero emission limit method, while the floating point method is invalid for the oxide cathode emissive probe.

中文翻译：

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使用由氧化物阴极制成的发射探针进行等离子体电位测量

开发了一种由氧化物阴极涂层组成的新型发射探针，以实现低工作温度和长使用寿命。与传统的钨发射探针相比，详细研究了新型发射探针的性能，包括工作温度、电子发射能力和等离子体电势测量。对工作温度和电子发射能力的研究表明，钨发射探头通常在 1800 K–2200 K 的温度下工作，而氧化物阴极发射探头的工作温度约为 1200 K–1400 K。此外，使用在不同放电功率的微波电子回旋共振等离子体中实现了不同技术的氧化物阴极发射探针。发现使用改进的拐点法和零发射极限法的热探针可以获得可靠的等离子体电势，而浮点法对于氧化物阴极发射探针无效。