New technologies to integrate electronics and sensors on or into objects can support the growth of embedded electronics. The method proposed in this paper has the huge advantage of being substrate-free and applicable to a wide range of target materials such as fiber-based composites, widely used in manufacturing, and for which monitoring applications such as fatigue, cracks, and deformation detection are crucial. Here, sensors are first fabricated on a donor substrate using standard microelectronic processes and then transferred to the host material by direct transfer printing. Results show the viability of composites instrumented by strain gauges. Indeed, dynamic and static measurements highlight that the deformations can be detected with high sensitivity both on the surface and at various points in the depth of the composite material. Thanks to this technology, for the first time, a substrate-free piezoresistive n-doped silicon strain sensor is transferred into a composite material and characterized as a function of strain applied on it. It is shown that the transfer process does not alter the electrical behavior of the sensors that are five times more sensitive than extensively used metallic ones. An application designed for monitoring the deformation of a rudder foil with a classic NACA profile in real time is presented.

中文翻译：

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用于结构健康监测的纺织品和复合材料上硅基和金属基应变传感器的无基材转移

将电子设备和传感器集成到物体上或内部的新技术可以支持嵌入式电子设备的发展。本文提出的方法具有无基材的巨大优势，适用于广泛的目标材料，例如纤维基复合材料，广泛应用于制造业，以及疲劳、裂纹和变形检测等监测应用是至关重要的。在这里，传感器首先使用标准微电子工艺在供体基板上制造，然后通过直接转印印刷转移到主体材料上。结果显示了应变仪检测的复合材料的可行性。事实上，动态和静态测量强调可以以高灵敏度检测复合材料表面和深度不同点的变形。借助这项技术，首次将无基板压阻式 n 掺杂硅应变传感器转移到复合材料中，并根据施加在其上的应变进行表征。结果表明，传输过程不会改变传感器的电气行为，这些传感器的灵敏度是广泛使用的金属传感器的五倍。提出了一种设计用于实时监测具有经典 NACA 轮廓的舵翼变形的应用程序。