This study investigates the measurement of plasma‐grown nanoparticles, comparing ex situ scanning electron microscopy (SEM) and an in situ light scattering method which is based on Mie theory and utilizes a neural network for evaluation. The research reveals that the particle size distribution (PSD) is normal and very narrow, supporting the common assumption of monodisperse particle clouds. Importantly, the study finds that the spread of the PSD increases proportionally with the mean size, suggesting varied growth rates based on the radius of the spherical dust grains. Both methods produce consistent results, which encourages the use of the interference‐free, real‐time, light‐based Mie method in similar studies.

中文翻译：

---

通过 SEM 分析灰尘颗粒尺寸和提取颗粒的尺寸分布，并与光散射技术进行比较

本研究研究了等离子体生长纳米粒子的测量，比较了异位扫描电子显微镜 (SEM) 和基于米氏理论并利用神经网络进行评估的原位光散射方法。研究表明，颗粒尺寸分布（PSD）是正态且非常窄，支持单分散颗粒云的常见假设。重要的是，研究发现 PSD 的扩散与平均尺寸成比例地增加，这表明根据球形尘埃颗粒的半径不同的增长率。两种方法都产生一致的结果，这鼓励在类似的研究中使用无干扰、实时、基于光的 Mie 方法。