Micro electrical discharge machining (μ-EDM) stands out as a widely employed non-traditional machining process with diverse applications in microfluidics, electronics, medical, aeronautics, and the automotive industry. This study is dedicated to the exploration of the single spark μ-EDM process utilizing a titanium tool electrode fabricated using a μm-turning process. Intriguingly, it is established that achieving a single spark necessitates a minimum tool diameter of 8 μm. Further, the effect of critical parameters such as voltage and capacitance on material removal rate (MRR), tool wear rate (TWR), as well as the shape and size of the resultant craters is investigated. A 7 μm tool electrode when subjected to a voltage of 100 V and a capacitance of 33 pF manifests a remarkably refined surface finish, demonstrating controlled erosion on the workpiece surface. The study also indicates that MRR and TWR vary exponentially with supplied discharge energy. This comprehensive analysis not only identifies optimal conditions for μm turning during tool fabrication but also elucidates the prerequisites for generating a controlled single spark during workpiece erosion. In essence, the findings presented here contribute valuable insights to the advancement of precision μ-EDM processes.

微放电加工 (μ-EDM) 作为一种广泛采用的非传统加工工艺而脱颖而出，在微流体、电子、医疗、航空和汽车行业有着广泛的应用。本研究致力于探索利用微米车削工艺制造的钛工具电极的单火花微米电火花加工工艺。有趣的是，已经确定要实现单个火花，最小工具直径必须为 8 μm。此外，还研究了电压和电容等关键参数对材料去除率 (MRR)、刀具磨损率 (TWR) 以及所得凹坑的形状和尺寸的影响。 7 μm 工具电极在承受 100 V 电压和 33 pF 电容时表现出非常精细的表面光洁度，表明工件表面的腐蚀受到控制。研究还表明，MRR 和 TWR 随所提供的放电能量呈指数变化。这种全面的分析不仅确定了刀具制造过程中微米车削的最佳条件，而且还阐明了在工件腐蚀过程中产生受控单火花的先决条件。从本质上讲，这里提出的研究结果为精密 μ-EDM 工艺的进步提供了宝贵的见解。