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Piezoresistive Micropillar Sensors for Nano-Newton Cell Traction Force Sensing J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-04-15 Isha Lodhi, Durga Gajula, Devin K. Brown, Nikolas T. Roeske, David R. Myers, Wilbur A. Lam, Azadeh Ansari, Oliver Brand
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High Sensitivity and Rapid Response Optomechanical Uncooled Infrared Detector From Self-Assembled Super-Aligned Carbon Nanotubes Film J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-04-15 Peng Zhang, Huwang Hou, Zhendong Luo, Ye Feng, Hongmei Zhong, Hui Zhang, Ting Meng, Yang Zhao
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Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-04-12 Tianjiao Gong, Muhammad Jehanzeb Khan, Yukio Suzuki, Takashiro Tsukamoto, Shuji Tanaka
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JMEMS Letters.1pt Parallel In-Plane Electrothermal Actuators J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-04-05 Yen Nee Ho, Aron Michael, Chee Yee Kwok, Cibby Pulikkaseril
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Journal of Microelectromechanical Systems Publication Information J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-04-05
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Widely-Tunable MEMS Phononic Frequency Combs by Multistage Bifurcations Under a Single-Tone Excitation J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-29 Jiahao Wu, Penghui Song, Shuke Zang, Yan Qiao, Ronghua Huan, Wenming Zhang, Lei Shao
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An Approach to Near Zero Power Bi-Stable Driving With a Simple Pulse Signal for RF MEMS Switch J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-25 Rusong He, Lyuyan Wang, Zhenci Sun, Jiahao Zhao
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Microfluidic Biosensor for the In Vitro Electrophysiological Characterization of Actin Bundles J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-25 Jorge Manrique Castro, Nilab Azim, Nicholas Castaneda, Ellen Kang, Swaminathan Rajaraman
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Improvement of MEMS Thermomechanical Actuation Efficiency by Focused Ion Beam-Induced Deposition J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-22 Bartosz Pruchnik, Tomasz Piasecki, Ewelina Gacka, Mateus G. Masteghin, David C. Cox, Teodor Gotszalk
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CMOS-Compatible Hollow Nanoneedles With Fluidic Connection J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-22 Noah Brechmann, Marvin Michel, Leon Doman, Andreas Albert, Karsten Seidl
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Feedthrough Engineering to Enable Resonant Sensors Working in Conductive Medium for Bio Applications J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-21 Zhong-Wei Lin, Cheng-Yen Wu, Sheng-Shian Li
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ErratumErratum to “Thin-Film Silicon MEMS for Dynamic Mass Sensing in Vacuum and Air: Phase Noise, Allan Deviation, Mass Sensitivity and Limits of Detection” J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-21 Rui M. R. Pinto, Pedro Brito, Virginia Chu, João Pedro Conde
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Quadruple Mass Gyroscope Angle Random Walk Reduction Through Linearized Transduction J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-18 Ryan R. Knight, Ryan Q. Rudy, Jeffrey S. Pulskamp, Robert R. Benoit, Don L. DeVoe, Esmond Lau
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Higher Order Mode Elimination for SAW Resonators Based on LiNbO₃/SiO₂/poly-Si/Si Substrate by Si Orientation Optimization J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-08 Huiping Xu, Sulei Fu, Rongxuan Su, Peisen Liu, Boyuan Xiao, Shuai Zhang, Rui Wang, Cheng Song, Fei Zeng, Weibiao Wang, Feng Pan
Lithium-niobate-on-insulator (LNOI) platform has emerged as a promising solution for fabricating wideband and low-loss surface acoustic wave (SAW) filters. However, it simultaneously excites higher order modes, causing out-of-band (OoB) spurious responses. In this work, the elimination condition for higher order modes in LiNbO3 (LN)/SiO2/poly-Si/Si structure was summarized from analyzing the coupling
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A 3 Degrees-of-Freedom Electrothermal Micro-Positioner for Optical Chip-to-Chip Alignment J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-07 Almur A. S. Rabih, Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki
This article proposes an electrothermal three-degrees-of-freedom (3-DOF) micro-positioner equipped with a waveguide path, which can potentially be used for chip-to-chip alignment in photonic integrated circuits. The micro-positioner provides translational displacements along the x-, y- and z- axes with manageable levels of cross-sensitivity between axes. A fabricated prototype provides displacements
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Optimization of Hemispherical Shell Resonator Structure Based on Thermoelastic Dissipation J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-03-05 Xiaoyan Sun, Haikuan Chen, Zhouwei He, Haoning Zheng, Ji’an Duan, Youwang Hu
This paper reports a method to optimize the structure of a hemispherical shell resonator by reducing the thermoelastic dissipation. In accordance with the thermoelastic damping theory, we set up a thermal insulation structure to change the heat conduction distance to improve the thermoelastic quality factor. And according to the distribution of elastic strain energy on the resonator, we set up the
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Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-02-28 Xiangyu Song, Lifeng Huang, Yuanjing Lin, Linze Hong, Wei Xu
In this paper, we present a surface micromachined Pirani vacuum gauge integrated with a stacked temperature sensor using CMOS-MEMS technology. The proposed Pirani gauge features a $2.23~\mu \text{m}$ thick suspended microheater, which is positioned between two designed heat sinks. The upper and lower gap spacing between the heat sink and the microheater is $0.53~\mu \text{m}$ , which is made by the
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Infrared-Driven Rapid Quantification of Magnetophoretically Trapped Drug J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-02-23 Vinit Kumar Yadav, Pankaj Pathak, Preetha Ganguly, Prashant Mishra, Samaresh Das, Dhiman Mallick
This work presents a rapid quantification approach for on-chip, trapped magnetic nanoparticle drug conjugate (MD) and tests its in-vitro efficacy using an integrated piezoelectric/ferromagnetic bilayer structure-based magnetoelectric sensor coupled magnetic microfluidic device. The MD trapping is accomplished using triangular-shaped, patterned permanent magnet integrated using elastomer-free, pure
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Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-02-22 Hengbo Zhu, Yun Cao, Wanli Ma, Xiaoyu Kong, Shenghong Lei, Haining Lu, Weirong Nie, Zhanwen Xi
Dynamic modeling is the basis for predicting the behavior of the electro-thermal actuator (ETA). Although the sequential decoupling method, often used in previous studies, has been able to model the dynamics of ETAs, most of them focused only on the ETAs themselves, and few considered the effects of end effectors. In this work, a dynamic multi-fields coupling model considering the effects of end effectors
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A Radiofrequency Threshold Temperature Sensor Using a Hf0.5Zr0.5O2 Device and a Microacoustic Piezoelectric Resonant Sensor J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-02-22 Onurcan Kaya, Luca Colombo, Pietro Simeoni, Benyamin Davaji, Matteo Rinaldi, Cristian Cassella
This article presents the first prototype of a novel threshold sensing system operating in the radiofrequency (RF) range, capable of passively detecting and recording instances of temperature violations with high sensitivity and without the need of DC-biased memory devices. The system comprises a microfabricated hafnium zirconium oxide (HZO) ferroelectric varactor, a microfabricated lithium niobate
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2023 Reviewers List J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-02-02
The IEEE Journal of Microelectromechanical Systems (JMEMS) Board of Editors greatly appreciates the support of those important people who, along with anonymous colleagues, contributed reviews for one or more articles processed by JMEMS during the year 2023 (from October 18, 2022 through December 31, 2023). Their contributions in time and expertise play an essential role in the ongoing development of
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TechRxiv: Share Your Preprint Research with the World! J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-02-02
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A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-30 Liangliang Lv, Qingrui Yang, Haolin Li, Zhaoxun Wang, Quanning Li, Xuejiao Chen, Menglun Zhang, Wei Pang
It is a longstanding issue that high-order width-extensional (WE) piezoelectric microelectromechanical system (MEMS) resonators suffer low quality factors (Q-factors). In this study, it is observed that the mode distortion occurs in each unit when it couples with each other to constitute the high-order WE-mode resonator, leading to a decreased Q-factor. Based on this finding, we propose a new Q-factor
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A Review on MEMS Silicon Resonant Accelerometers J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-26 Zhao Zhang, Hemin Zhang, Yongcun Hao, Honglong Chang
This paper reviews the development of silicon resonant accelerometers from 1987 to 2022. For more than 30 years, silicon resonant accelerometers have developed into varieties of structures based on different sensing methods. In the beginning, resonant accelerometers were reported to realize acceleration measurements by detecting the frequency shifts of resonators. A variety of advancements have emerged
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Experimental and Simulative Correlations of the Influence of Solder Volume and Receptor Size on the Capillary Self-Alignment of Micro Solar Cells J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-23 Victor Vareilles, Elisa Kaiser, Philippe Voarino, Maike Wiesenfarth, Romain Cariou, Frank Dimroth, Yannick Veschetti, Mohamed Amara, Henning Helmers
Surface tension-driven self-alignment is a promising technique to align millimeter-scale components with a high accuracy of a few microns. It is based on liquid capillary forces moving and aligning a solid component on its receiving pad. Using molten solders as the liquid is a promising way to bond, connect and align a chip with its substrate. Micro-solar cells soldering experiments for micro-concentrator
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Enhanced Performance in Energy of Low Frequency Triboelectric-Nanogenerator Systems J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-23 Gaëtan Vauche, Christophe Corbier
This paper shows that a pre-excitation boost sequence as a friction phase before vertical separation mode improves low frequency triboelectric nanogenerators (LF-TENG) in energy. A space modeling of motions based Maxwell’s approach is proposed. Experimental investigations from a real device and comparisons between measurements and theory are carried out. [2023-0051]
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Silicon-Based Suspended Microchannel Resonator Developed Using Au Thermal Diffusion Bonding for Mass Sensing of Biomaterials J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-22 Keita Funayama, Atsushi Miura, Fumihito Arai, Hiroya Tanaka
Suspended microchannels are of great interest in applications such as physical and chemical sensor systems. In this study, we developed a suspended microchannel resonator (SMR) by bonding two separate Au-coated silicon–insulator–silicon substrates via thermal diffusion bonding. To obtain a secure bond between Au films, we investigated different bonding temperatures and Au film thicknesses. As a result
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Conformally Overlaid Ferromagnetic Shadow Masks for Etching and Deposition Processes J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-17 Minwoo Choi, Taeyeong Kim, Bong Jae Lee, Jaeman Song, Jungchul Lee
The pattern fabrication using a shadow mask does not involve the use of solutions, which is beneficial for scenarios incompatible with wet processes. However, when the shadow mask is partially fixed from its edges, the conformal overlay of the mask may be not ensured, which can give rise to blurred patterns. This study proposes a conformally overlaid ferromagnetic shadow mask (FSM) to the substrate
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Electrowetting Ionic Liquid Flow Controller J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-17 Jonathan MacArthur, Paulo Lozano
Ionic liquids are used in a variety of chemical, microfluidic, aerospace, and other diverse applications. Microfluidic applications often require a small footprint and manage small volumes of fluid in their channels on the order of microliters or less. Many microfluidic devices utilize external pressure systems or mechanical pumping mechanisms to control the flow of fluids through the device, inherently
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High-Quality Light Field Microscope Imaging Based on Microlens Arrays J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-11 Tongkai Gu, Sitong Yan, Lanlan Wang, Yasheng Chang, Hongzhong Liu
High-quality optical observation through traditional microscopes faces significant challenges due to their low spatial sampling and the limited ability to respond only to the light intensity characteristics of optoelectronic devices. This limitation results in an inability to measure other critical optical information during imaging, such as phase, angle, polarization, and coherence. In response to
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A PZT Thin-Film Traveling-Wave Micro-Motor With Stator Teeth Based on MEMS Technology J. Microelectromech. Syst. (IF 2.7) Pub Date : 2024-01-09 Tianyu Yang, Yu Chen, Binglei Zhang, Binlei Cao, Xiaoshi Li, Kaisheng Zhang, Jiangbo He, Wei Su
The piezoelectric thin-film traveling-wave micro-motor based on the microelectromechanical systems (MEMS) process has the advantages of compact size, easy integration and batch production. However, the piezoelectric thin-film micro-motor still exits a serious shortcoming of very small output torque. This paper proposes a novel lead zirconate titanate (PZT) piezoelectric thin-film motor with stator
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Highly Tunable Piezoelectric Resonators Using Al0.7Sc0.3N J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-29 Izhar, Yang Deng, Merrilyn M. A. Fiagbenu, Abhay Kochhar, Ramakrishna Vetury, Roy H. Olsson
We report a frequency tunable Lamb wave piezoelectric resonator using an Al0.7Sc0.3 N thin film. The frequency tuning of the resonator is demonstrated by its stiffness manipulation which is achieved by terminating the tuning electrodes (TE) with a variable capacitor. Resonators with 2, 3, 4, and 5 TE were fabricated and characterized. The highest tuning range of 24,694 ppm was achieved for the resonator
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A Mechanically Coupled Piezoelectric MEMS Filter With Tiny Percent Bandwidth and Low Insertion Loss J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-29 Kewen Zhu, Yuhao Xiao, Jinzhao Han, Guoqiang Wu
Mechanical filters implement channel selection in a tiny percent bandwidth and become essential components in wireless communication systems and sensor networks. This paper reports a mechanically coupled piezoelectric microelectromechanical system (MEMS) filter, which consists of two width-extensional (WE) mode resonators mechanically coupled by a straight beam. The coupling beam, located at the plate
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A “Smart” Gas Sensing System Composed of Micro-Hotplates and Artificial Neural Network J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-28 Zong Liu, Yushen Hu, Fei Wang, Man Wong
Integrating in one package a gas sensor array (GSA) unit and an artificial neural network (ANN) unit, a gas-sensing system based on two types of metal-oxide semiconductors is described. The GSA consists of micro-hotplates (MHPs) monolithically integrated with thin-film transistors (TFTs) built using a first metal-oxide semiconductor (MOS). The structural plates for realizing the MHPs are spontaneously
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Multi Degrees-of-Freedom Hybrid Piezoelectric-Electrostatic MEMS Actuators Integrated With Displacement Sensors J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-19 Almur A. S. Rabih, Seyedfakhreddin Nabavi, Michaël Ménard, Frederic Nabki
This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to position a suspended optical waveguide for chip-to-chip alignment in photonic integrated circuits. In this context, the mechanical structures of the actuators with a suspended platform to carry the waveguide, are designed
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3D Flexible Wind Sensor With its Optimization and Environmental Effect J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-15 Zhenxiang Yi, Yu Wan, Ming Qin, Qing-An Huang
This paper proposes a new three-dimensional (3D) flexible wind sensor by utilizing dual-layer differential capacitors. The deformation of the sensor caused by wind leads to eight capacitances variation, which can be applied to obtain the wind speed along the x, y, and z axes (vx, vy and vz). Consequently, the 3D wind speed and direction are calculated by the vector synthesis. The feasibility of this
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Sealed-Cavity Bulk Acoustic Resonator for Subsequent Fabrication and Higher Order Mode J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-12 Jiashuai Xu, Zong Liu, Junyan Zheng, Fangsheng Qian, Man Wong, Yansong Yang
This focuses on developing a new platform for the thin-film bulk acoustic wave (BAW) resonator, which features predefined sealed cavities, self-formed acoustic boundaries, and compatibility with subsequent fabrication. Different from conventional BAW resonator fabrication methods, this work has simplified fabrication by using silicon migration technology: building freely predefined cavities with self-formed
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A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-07 Chuan-Hui Ou, Nguyen Van Toan, Yao-Chuan Tsai, Ioana Voiculescu, Masaya Toda, Takahito Ono
An electromagnetic tip-tilt-piston micromirror with a large stroke is presented. This research introduced a novel actuation structure, based on a spring made from conductive metallic glass with excellent mechanical properties. For the first time, two functional elements, an electromagnetic actuation element and a mechanical support structure, were successfully integrated into a single-layer spring
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Monolithically Integrated 3D Atomic Chip for Quantum Optical Magnetometry J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-05 Ziji Wang, Junming Wu, Gong Sun, Jintang Shang
A monolithically integrated 3D atomic chip for weak magnetic field detection is presented in this work. A 14.8 ohm MEMS thin film non-magnetic micro heater is monolithically integrated onto a micro spherical alkali vapor cell to realize on-chip atomic density control. Both magnetic and thermal characteristics of the non-magnetic heater are analyzed theoretically. Based on the heater-integrated atomic
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Roll to Roll Imprinting PDMS Microstructures Under Reduced Ambient Pressures J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-05 Olli-Heikki Huttunen, Johanna Hiitola-Keinänen, Jarno Petäjä, Eero Hietala, Hannu Lindström, Jussi Hiltunen
High-volume manufacturing of microstructures is essential for the uptake of the related scientific results for commercial use and also if hundreds or thousands of devices with repeatable performance are needed during the large-scale experimental research. Polydimethyl siloxane (PDMS) is one of the most widely used materials for academia to prepare microfluidic test devices. This has also motivated
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Novel Area-Changed Capacitive Methods for Simultaneous Displacement Transducing and Force Balance in a Nano-g MEMS Accelerometer J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-01 Fangzheng Li, Dandan Liu, Le Gao, Bingyang Cai, Lujia Yang, Yuan Wang, Chun Zhao, Wenjie Wu, Liangcheng Tu
High-precision MEMS accelerometers with nano-g resolution are emergent instruments for geophysical applications and proved their competence in terms of functionality. The electromagnetic actuator, which serves as an auxiliary component in nano-g MEMS accelerometers for improving the dynamic response, faces the challenges of process incompatibility, temperature sensitivity, and large form factor. Thereby
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Development of PMUT-Based High Sensitivity Gas Flow Sensor J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-12-01 Tapio Pernu, Teuvo Sillanpää, Cyril Baby Karuthedath, Abhilash Thanniyil Sebastian
Piezoelectric micromachined ultrasound transducers (PMUTs) and a high sensitivity PMUT-based gas flowmeter were designed, fabricated and characterised. In this work a single side measurement geometry is introduced for a simple PMUT assembly and enabling high sensitivity for the low flowrate measurement. While PMUT-based gas flow sensors of previous work serve higher flowrate ranges, the advantage of
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Frequency Tuning Method on Teeth-Like Tines of the Fused Silica Micro-Hemispherical Resonator Using Femtosecond Laser J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-11-28 Youwang Hu, Haoning Zheng, Yao Wang, Yalong Wang, Xiaoyan Sun, Ji’an Duan
The fused silica micro-hemispherical resonant gyroscope is a new type of solid-wave gyroscope and offers numerous benefits including high precision, low power consumption, small size, and long life. The core component of the gyroscope is the micro-hemispherical resonator (MHR). The inevitable frequency split of the MHR working modes will directly restrict the performance improvement of the gyroscope
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Response Speed Characterization of a Thermally Actuated Programmable Metamaterial J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-11-22 Chenyang Luo, Jonathan B. Hopkins, Michael A. Cullinan
This work details the experimental characterization of a MEMS thermal actuator, which constitutes a three-dimensional meso-robotic metamaterial lattice that can achieve actively controlled mechanical properties such as tunable stiffness. To achieve a target stiffness value via closed-loop control in a timeframe that is practical for most metamaterial applications, it is necessary that such actuators
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A Near-Zero Thermoelectric RF Power Sensor for High Dynamic Range Applications J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-11-16 Zhiqiang Zhang, Runqi Gu, Yifei Jiang, Yan Cui, Chunhua Cai
A novel broadband and thermoelectric RF power sensor with the near-zero power consumption is proposed for high dynamic range detection applications. This sensor is based on the RF power-heat-electricity operating principle and is fabricated using microelectromechanical systems (MEMS) and GaAs monolithic microwave integrated circuit (MMIC) processes. During operation, the device consumes no DC power
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Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-11-16 Mohammad Kazemi, Seyedfakhreddin Nabavi, Mathieu Gratuze, Frederic Nabki
The utilization of MEMS resonators in microelectronics has garnered significant attention, given their crucial role in a multitude of applications, including timing and sensing. Among the various types of resonators, tunable resonators are particularly noteworthy, as they possess the capability of dynamically adjusting their resonant frequency. Accordingly, this work presents an innovative method for
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Impedance Sensing in CMOS-Embedded Microfluidics Using BEOL Electrodes J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-11-03 Wei-Yang Weng, Jun-Chau Chien
This paper describes a novel CMOS-embedded microfluidics platform featuring on-chip impedance-sensing electrodes. The platform employs a single-step wet etching process, removing the CMOS back-end-of-line (BEOL) routing metals, to create hollow fluidic channels that can be closely integrated with active circuits. We optimize the process parameters and improve the etch rate by 10Í through screening
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Theoretical Analysis and Verification on ScAlN-Based Piezoelectric Micromachined Ultrasonic Transducers With DC Bias J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-10-24 Zekai Wang, Wenjuan Liu, Bohao Hu, Yuhao Xiao, Chaoxiang Yang, Liangyu Lu, Yao Cai, Yan Liu, Chengliang Sun
Applying a DC bias can effectively tune the performance of a piezoelectric ultrasonic micromachined transducer (PMUT) to meet the requirements in multiple application scenarios. However, the effect of DC bias on various parameters of PMUT has not been systematically analyzed and verified. In this work, a theoretical model of scandium-doped aluminum nitride (ScAlN) based PMUT under different DC biases
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Thin-Film Lithium Niobate Acoustic Filter at 23.5 GHz With 2.38 dB IL and 18.2% FBW J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-10-20 Omar Barrera, Sinwoo Cho, Lezli Matto, Jack Kramer, Kenny Huynh, Vakhtang Chulukhadze, Yen-Wei Chang, Mark S. Goorsky, Ruochen Lu
This work reports an acoustic filter at 23.5 GHz with a low insertion loss (IL) of 2.38 dB and a 3-dB fractional bandwidth (FBW) of 18.2%, significantly surpassing the state-of-the-art. The device leverages electrically coupled acoustic resonators in 100 nm 128° Y-cut lithium niobate (LiNbO3) piezoelectric thin film, operating in the first-order antisymmetric (A1) mode. A new film stack, namely transferred
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Design and Fabrication of a Micropillar-Pumped Polymer Loop Heat Pipe J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-10-20 Masaaki Hashimoto, Taiga Kawakami, Abdulkareem Alasli, Ryobu Nomura, Hosei Nagano, Ai Ueno
This letter presents a micropillar-pumped polymer loop heat pipe (LHP) with potential applications in flexible electronics. A unique evaporator with a micro pillar wick was designed for a flexible polymer LHP. The polymer LHP was fabricated via simple and cost-effective soft lithography, omitting the need for a porous wick. This design and fabrication approach facilitated passive two-phase cooling
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Millimeter Wave Thin-Film Bulk Acoustic Resonator in Sputtered Scandium Aluminum Nitride J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-10-20 Sinwoo Cho, Omar Barrera, Pietro Simeoni, Emily N. Marshall, Jack Kramer, Keisuke Motoki, Tzu-Hsuan Hsu, Vakhtang Chulukhadze, Matteo Rinaldi, W. Alan Doolittle, Ruochen Lu
This work reports a millimeter wave (mmWave) thin-film bulk acoustic resonator (FBAR) in sputtered scandium aluminum nitride (ScAlN). This paper identifies challenges of frequency scaling sputtered ScAlN into mmWave and proposes a stack and new fabrication procedure with a sputtered Sc0.3 Al0.7 N on Al on Si carrier wafer. The resonator achieves electromechanical coupling ( ${k} ^{2}$ ) of 7.0% and
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Hybrid MEMS Actuator With 3 Degrees-of- Freedom for Efficient Planar Optical Switching J. Microelectromech. Syst. (IF 2.7) Pub Date : 2023-10-20 Suraj Sharma, Seyedfakhreddin Nabavi, Almur Abdelkreem Saeed Rabih, Michaël Ménard, Frederic Nabki
This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom (DOF). The prototype MEMS actuator tested produces maximum displacements of $8.8 \mu \text{m}$ along the positive X-axis, and $8.5 \mu \text{m}$ along the negative X-axis, with digital control. Analog control produces maximum