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Preparation of robust superhydrophobic surface on PET substrate using Box-Behnken design and facile sanding method with PTFE powder J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-27 Xin Wang, Tao Wang, Jie Sheng, Ziting Wang, Weizhi Yang, Meng Li, Liping Shi
Superhydrophobic surfaces have attracted increasing interests due to their excellent features, while achieving facile preparation of superhydrophobic surface with good mechanical stability is still a challenging work. In this paper, we prepared a superhydrophobic surface by sanding polytetrafluoroethylene powder directly onto the surface of a polyethylene terephthalate (PET) film by means of a simple
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Sub-miniature rolling thrust micro-bearing J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-20 Marcin Michałowski, Zbigniew Kusznierewicz, Sergiusz Łuczak, Artur Chańko, Mateusz Samsel, Paweł Pieńczuk
The original design of the smallest two-way rolling thrust micro-bearing with sub-millimeter dimensions is presented. The bearing is self-contained and is capable of transmitting thrust load up to about 8 N in two directions, as well as radial loads up to about 0.4 N. Thanks to special design of the raceways, operation without lubrication is possible. The scope of experimental study is discussed, and
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Reflective x-ray masks for x-ray lithography J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-14 V S Chumak, S Peredkov, A Yu Devizenko, I A Kopylets, Yu P Pershyn
Application of x-ray multilayers as reflective x-ray masks for x-ray lithography is proposed. The mask is a specially prepared multilayer mirror capable to selectively reflect x-rays. The use of grazing geometry allows a pattern design on the mask to be compressed in one direction. Application examples are given for the masks (WC/Si multilayers) with two types of a radiation source: an x-ray tube (λ
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MEMS highly sensitive and large-area force plate for total ground reaction force measurement of running ant J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-12 Hidetoshi Takahashi, Sumihiro Kohyama, Tomoyuki Takahata, Isao Shimoyama
Terrestrial insects exhibit agile manoeuvrability while running. However, the ground reaction force (GRF) in small insects remains poorly understood owing to its size and acting force. Here, we present a force plate for the measurement of total GRF during the running motion of ants with a force on the order of several tens of μN. The proposed force plate consists of a sufficiently large plate for several
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Investigation of spurious mode suppression in 3.8 GHz shear-horizontal mode surface acoustic wave resonators based on LiNbO3/SiO2/Si multilayer structure J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-12 Cheng Tu, Ting-yang Zhang, Zhuo Zhang, Qin-wen Huang, Xiao-sheng Zhang
LiNbO3(LN)/SiO2/Si multilayer structures have recently attracted much attention due to their superior performance in realizing wideband radio-frequency acoustic filters. However, the spurious modes, which are commonly found in LN-on-insulator (LNOI) resonators, often cause in-band ripples and a deteriorated out-of-band suppression level. Although much research work has been done on the suppression
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An SOI-based post-fabrication process for compliant MEMS devices J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-12 Yongcun Hao, Yanlong Wang, Yonghao Liu, Weizheng Yuan, Honglong Chang
Fabricating compliant microelectromechanical system (MEMS) devices is challenging because they are easily damaged during fabrication. This paper presents a fabrication process based on the silicon-on-insulator (SOI) wafer for compliant MEMS devices. In the fabrication process, tethers were used to enhance the strength of the compliant devices during fabrication and finally melted with an electric current
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Manufacturing and characterization of CMOS-MEMS magnetic field microsensors with isolated cavities J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-12 Ching-Liang Dai, Zhang-Li Zhu, Chun-Yi Chang, Cheng-Chih Hsu
The study investigates a magnetic field (MF) microsensor with isolated cavities manufactured utilizing complementary metal oxide semiconductor (CMOS)-microelectromechanical system technology. This microsensor, which is a type of magnetic transistor, comprises four identical magnetic sensing elements, each featuring an emitter, a base, two collectors, and an additional collector. The magnetic transistor
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Wafer-scale silicon microfabrication technology toward realization of low-cost sub-THz waveguide devices J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-08 Xinghai Zhao, Peng Wu, Fei Liu
This paper presents a wafer-scale silicon microfabrication technology for the sub-terahertz (sub-THz) waveguide device mass production. Based on the effective scheme, a WR-5 (140–220 GHz) straight rectangular waveguide and a WR-2.8 (260–400 GHz) rectangular waveguide bandpass filter are implemented as demonstrated examples. The silicon deep reactive ion etching (DRIE) process is employed to etch through
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Innovating in-situ characterization: a comprehensive measurement system for measuring the ZT and the contact resistance of vertical thermolegs exploiting the vertical transfer length method J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-08 Negin Sherkat, Athira Kattiparambil Sivaprasad, Uwe Pelz, Peter Woias
In order to optimize their system design and manufacturing processes, it is crucial to undertake a thorough electrical and thermal characterization of micro thermoelectric generators (µTEGs). To address this need, a highly advanced and fully integrated in-situ measurement system has been developed. The main objectives of this system are to (1) enable the measurement of ZT and thereby of all thermoelectric
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Design and fabrication of a sensors-integrated silicon electrode for gap status monitoring in micro electrochemical machining J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-03-06 Yulan Zhu, Guodong Liu, Yong Li, Hao Tong
The monitoring of micro machining gap and the control of machining status within the gap have become bottlenecks in the research and development of micro electrochemical machining (ECM). General electrical signals are difficult to reflect the status of micro machining gap. Electrolytic products in micro machining gap are prone to precipitation and retention, leading to unstable material removal process
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Passive communication for low power distributed sensors using MEMS optical cavities J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-23 Jacob Schopp, Shamus McNamara
Distributed sensing has been of great interest in recent research. Distributed sensors are in part defined by the methods they use to communicate. We demonstrate a new low power method of optical communication. Instead of communicating optically by generating new light to communicate using a light emitting diode or laser, our method uses optical interference to vary the reflectivity of a micro-electromechanical
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Regulating the electrical performance of contact-separation mode triboelectric nanogenerators based on double-sided groove textures J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-22 Weixu Yang, Suqing Yang, Zhen Sun, Ping Chen, Xiaoxi Qiao
The contact-separation mode triboelectric nanogenerators (CS-TENGs) is a kind of micro/nano electromechanical power system based on the contact electrification and electrostatic induction. With the expansion of application field of the CS-TENG, regulating the electrical performance becomes essential. In this paper, simple and effective methods for the CS-TENG output regulation based on the double-sided
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Effects of micromachining on anti-oxidant elution from a mechanically-adaptive polymer J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-20 Natalie N Mueller, Youjoung Kim, Mali Ya Mungu Ocoko, Peter Dernelle, Ishani Kale, Simran Patwa, Anna Clarissa Hermoso, Deeksha Chirra, Jeffrey R Capadona, Allison Hess-Dunning
Intracortical microelectrodes (IMEs) can be used to restore motor and sensory function as a part of brain–computer interfaces in individuals with neuromusculoskeletal disorders. However, the neuroinflammatory response to IMEs can result in their premature failure, leading to reduced therapeutic efficacy. Mechanically-adaptive, resveratrol-eluting (MARE) neural probes target two mechanisms believed
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Wearable microfluidic sweat collection platform with a calorimetric flow rate sensor for realtime and long-term sweat rate measurements J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-19 Angelito A Silverio, Eric Tatt Wei Ho, Jerard Ang, Kiara Esguerra
This work presents the design and fabrication of a wearable microfluidic patch-based system for sweat collection with a calorimetric flow rate sensor based on heat convection for measuring sweat rate (SR). The effects were predicted using a 3D multi-physics simulator and were verified on a fabricated patch made of polyimide layers. The sensor can detect surface temperature gradients of 302–312 K caused
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Demonstration of MHz piezoelectric micromachined ultrasonic transducers array and its potential application for biomedical treatment J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-15 Dengke Wang, Yucheng Ji, Shaokun Wang, Songsong Zhang
In this paper, we successfully developed the 24 × 31 piezoelectric micromachined ultrasound transducers (PMUTs) array with 8 inch complementary metal oxide semiconductor (CMOS) compatible processes. Scandium aluminum nitride (ScxAl1−xN) thin film (x = 20%) was used as the piezoelectric material. The PMUTs array was fabricated on 8 inch cavity silicon-on-insulator wafers with the device silicon layer
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Effect of bonding adhesive thickness on temperature characteristics and strain characteristics of SAW strain sensors J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-15 Qiang Liu, Wenlong Yang, Hongyuan Li, Hong Xu
Accurate measurement of physical parameters based on sensing technology is an important basis for equipment structural health monitoring technology. In harsh environments, strain measurement techniques based on SAW sensors have attracted much attention. The bonding adhesive is a key step in the strain measurement process, and its effect on the accuracy of the measurement results cannot be ignored.
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Thermal and hydraulic performance of Al alloy-based 3D printed triangular microchannel heatsink governed by rough walls with graphene and alumina nanofluids as working liquid J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-14 Puurnaraj Nadarajah, Khairudin Mohamed, Jamaluddin Abdullah, Mutharasu Devarajan
Microchannel heat sinks (MCHS) are known for providing enhanced cooling performance but their fabrication requires complex and multi-step processes. The recent development of additive manufacturing has enabled the fabrication of state-of-art monolithic structures that had been impossible to build using conventional methods. In this work, a monolithic cross-flow triangular cross-section MCHS was fabricated
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Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-14 Xuanmeng Qi, Shinya Yoshida, Sarah Risquez, Anirban Ghosh, Mohssen Moridi, Shuji Tanaka
In this study, a piezoelectric micromachined ultrasonic transducer (pMUT) was developed using dual heterogeneous piezoelectric thin films stacked on top of each other. One piezoelectric layer is specialized for the actuation, while the other is specialized for the reception of the ultrasonic waves. This combined use of two materials promises to realize a pMUT transceiver array with an excellent transmitting
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Three-dimensional carbon interdigitated ring array nanofibers for electrochemical detection of dopamine neurotransmitter J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-14 Elyana Kosri, Fatimah Ibrahim, Aung Thiha, Marc Madou
Dopamine (DA) neurotransmitter is a prominent component of the central nervous system and its deficiency contributes to several diseases, such as Parkinson’s disease and schizophrenia, which significantly influence the quality of life of affected individuals. This paper introduces a circular interdigitated ring electrode, the three-dimensional carbon interdigitated ring array nanofibers (3D C-IDRA
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A compact and reconfigurable C-band DGS-based power divider using RF MEMS capacitive switch J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-07 Niharika Narang, Pranav Kumar Shrivastava, Ananjan Basu, Pushpapraj Singh
This article presents a reconfigurable and compact power divider design that utilizes a combination of defect structures in the ground plane (DGS) and capacitance loading using a unique RF MEMS switch on the sapphire substrate. The combination of these two techniques results in a reduced-size reconfigurable power divider, wherein the length of the quarter-wavelength transmission line is reduced to
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Computational modelling and experimental investigation of micro-electrochemical discharge machining by controlling the electrolyte temperature J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-02-06 Dil Bahar, Akshay Dvivedi, Pradeep Kumar
Glass vias are emerging as a favourable option for radiofrequency-based micro-electromechanical system packaging. For the micromachining of glass, electrochemical discharge machining (ECDM) could be the most suitable technique if issues pertaining to the process stability are addressed thoroughly. The electrolyte temperature has immense influence on the viscosity and conductivity of the electrolyte
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Highly sensitive flexible capacitive pressure sensor with structured elastomeric dielectric layers J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-31 Gaurav Rawal, Animangsu Ghatak
Sensitive yet stable, robust yet flexible and accurate yet energy efficient pressure sensors are required for variety of purposes. While a large variety of designs and dielectric materials have been explored for this purpose, there is still need of a flexible pressure sensor that will allow easy scale up and inexpensive fabrication. To this end, we have presented here the design of a flexible capacitive
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High performance field emission cathode based on the diamond nanowires prepared by nanocrystalline diamond films annealed in air J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-31 Yang Wang, Chen Lin, Jinwen Zhang
This paper reports the field emission (FE) characteristics of a diamond nanowires (DNWs) array. The nanocrystalline diamond (NCD) film was deposited on silicon by microwave plasma chemical vapor deposition (MPCVD) and then annealed in air forming DNWs and hydrogenated at last. A high-field flat-plate emission test structure with a 1.03 μm gap between anode and cathode was prepared and the electrical
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Development of microneedle based blood extraction device J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-24 Chao-Wei Dong, Kang-Hyuk Lee, Jong-Hyun Na, Dong-Hyun Joo, Jin-Ho Choi, Woo-Tae Park
Microneedles can extract various analytics from the human body in a minimally invasive manner and provide real-time diagnosis, making microneedle-based point-of-care testing devices increasingly popular. In this paper, we propose a press-activated blood extraction system that integrates solid microneedles and 3D-printed blood collection devices for efficient blood extraction. The technology combines
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A penetration efficiency model for the optimization of solid conical microneedles’ geometry J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-23 Leonardo Piccolo, Kristal Bornillo, Sara Micheli, Marco Sorgato, Mauro Ricotta, Elisa Cimetta, Giovanni Lucchetta
Microneedles (MNs) are promising alternatives to pills and traditional needles as drug delivery systems due to their fast, localized, and relatively less painful administration. Filling a knowledge gap, this study investigated and optimized the most influential geometrical factors determining the penetration efficiency of MNs. The effects of height, base diameter, and tip diameter were analyzed using
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Precise in-situ fabrication of perovskite single crystal arrays via cosolvent based electrohydrodynamic printing J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-22 Rui Yu, Wenshuo Xie, Weili Yang, Xinrui Yang, Yongqing Duan
Single crystal (SC) perovskites exhibit superior stability and optoelectronic performance compared to polycrystalline ones, offering significant potential for high-performance and low-cost photovoltaic/optoelectronic applications. However, conventional SC growth processes often require intricate cutting or transferring of SC in the manufacturing of optoelectronic devices. High-resolution, in-situ,
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A liquid–metal-based microscale calorimetric in-chip flow sensor for flow rate measuring J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-22 Yuqin Deng, Zi Ye, Zhongshan Deng, Jie Hong, Huimin Zhang, Lin Gui
This work proposes a liquid–metal-based calorimetric micro-flow sensor within a polydimethylsiloxane (PDMS) chip. It can measure the flow rate of fluid in microscale channels, with a range as low as several microliters per minute. This in-chip sensor is proposed to solve the issue of detecting the flow rate in microfluidic systems. To make the sensor compatible with PDMS microfluidic chips, low-melting-point
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Artificial swim by undulating rigid flagellum with joint controllers J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-19 Ryosuke Yano, Hisayasu Kuroda
In this paper, we investigate the locomotion of artificial (robotic) swimmers by an undulating rigid flagellum, whose joints are controlled by actuators. The locomotion of a swimmer with an undulating rigid flagellum inside a two-dimensional channel sandwiched by two non-slip walls is numerically analyzed using the immersed boundary lattice Boltzmann method. Multi-relaxation-time scheme is applied
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Experimental study on femtosecond laser ablation of 4H–SiC substrate J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-19 Ziqiang Zhao, Lin Zhao, Yun Peng
Silicon carbide (SiC) is an ideal substrate for manufacturing high-power electronic devices and microwave devices and has broad application prospects. The surface treatment of SiC wafers plays a critical role and faces challenges in the semiconductor industry. Among the multiple treatment methods, the laser-based method has gradually attracted the attention of scholars. Therefore, this research uses
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Fabrication of high-aspect-ratio metallic microstructures by microelectroforming using silver-coated polydimethylsiloxane molds with controllable wettability J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-18 Bo Zhou, Longfei Xie, Tingli Wang, Bo Su, Junhu Meng
Microelectroforming is a specialized electroplating process to prepare functional metallic microstructures. However, the formability of microelectroforming is usually restricted by the limited mass transfer in high-aspect-ratio microcavities of molds. This paper presents a simple and reliable method utilizing silver (Ag)-coated polydimethylsiloxane (PDMS) molds with controllable wettability to enhance
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Large area nanoscale patterning of functional materials using organosilicate ink based nanotransfer printing J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-12 Stephen Binderup, Korampally Venumadhav
This paper presents a versatile nanotransfer printing method for achieving large-area sub-micron patterns of functional materials. Organosilicate ink formulations combined with effective release layers have been shown to facilitate patterning of materials through the commonly used patterning approaches—lift off, physical etching and chemical etching. In this paper, we demonstrate that organosilicate
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Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-12 Manu Garg, Dhairya Singh Arya, Sushil Kumar, Khanjan Joshi, Mujeeb Yousuf, Yi Chiu, Pushpapraj Singh
An electrostatically actuated all-metal microelectromechanical systems (MEMS) Pirani gauge with a tunable dynamic range is proposed. Contrary to the conventional fixed gap Pirani gauges, an electrostatic mechanism is employed to tune the gaseous conduction gap. Due to the electrostatic force between the heating element and heat sink, this tuning results in shifting the transition pressure to a higher
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Carbon dioxide reduction utilizing a bismuth halide perovskite as immobilized photocatalyst in a 3D printed microreactor J. Micromech. Microeng. (IF 2.3) Pub Date : 2024-01-12 Jose A Santamaria Cordero, Hannia Lopez, Marisol Ledezma, Leslie W Pineda, J Esteban Duran
The rising concerns about CO2 levels in the atmosphere and energy dependency on non-renewable sources, such as fossil fuels, could find an integral solution in CO2 photocatalytic reduction. The present work explores two alternatives to the main hindering factors for this reaction, i.e. the reactor configuration and the photocatalyst utilized. A microreactor was designed and 3D printed, providing a
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Seven-shaped beam design for improving the sensitivity of two-dimensional MEMS sensors J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-12-28 Nanyan Zhou, Wu Liu, Feng Cui, Xinwei Zhang, Leyang Lv
The spring constant of the connecting beam is one of the most crucial factors that affect the detection sensitivity of MEMS sensors. Existing researches reduce the spring constant by changing the parameters or number of connecting beams. In this paper, we propose a seven-shaped beam structure to modify the spring constant of MEMS sensors. The acute angle between the two segments of seven-shaped structure
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Dynamic micromechanical measurement of the flexural modulus of micrometre-sized diameter single natural fibres using a vibrating microcantilever technique J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-12-19 Ali Reda, Thomas Dargent, Steve Arscott
The dynamic response of a structure is a manifestation of its inherent characteristics, including material density, mechanical modulus, thermo- and viscoelastic properties, and geometric properties. Together, these factors influence how the material behaves in dynamic scenarios, dictating its damping properties and behaviour under varying forces. In this study we present a novel approach to accurately
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Design and fabrication of microfluidic devices: a cost-effective approach for high throughput production J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-12-11 Tony Thomas, Amit Agrawal
Microdevices have been recognized as a potential platform for performing numerous biomedical analysis and diagnostic applications. However, promising and viable techniques for a cost-effective and high throughput production of microfluidic devices still remain as a challenge. This paper addresses this problem with an alternative solution for the fabrication of microfluidic devices in a simple and efficient
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One-to-two internal resonance in a micro-mechanical resonator with strong Duffing nonlinearity J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-12-11 Jun Yu, Ata Donmez, Hansaja Herath, Hanna Cho
This paper investigates the implementation of 1:2 internal resonance (InRes) in a clamped–clamped stepped beam resonator with a strong Duffing effect, focusing on its potential for frequency stabilization in micro-electro-mechanical systems (MEMS) resonators. InRes can arise in a nonlinear system of which mode frequencies are close to an integer ratio, facilitating the internal exchange of energy from
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Relationship between bonding strength and surface roughness in low-temperature bonding of glass for micro/nanofluidic device J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-12-07 Ryoichi Ohta, Kyojiro Morikawa, Yoshiyuki Tsuyama, Takehiko Kitamori
The bonding of glass substrates is an important process in the fabrication of glass micro/nanofluidic devices. In this study, the influence of the surface roughness of glass substrates after low-temperature bonding is investigated. It is found that plasma etching can be used to control the surface roughness to the range 2–9 nm. Substrates with a roughness of 5 nm or less can be bonded. The pressure
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A combined MEMS thermal vacuum sensor with a wide pressure range J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-12-06 Chuang Yuan, Jianyu Fu, Fan Qu, Qiong Zhou
MEMS thermal vacuum sensors have been widely applied in many academic and industry fields, and pressure range is a key performance of MEMS thermal vacuum sensors. To extend the pressure range, a combined MEMS thermal vacuum sensor that consists of two diode-type MEMS thermal vacuum sensors in series is proposed in this work. The two diode-type sensors are designed to have different areas of sensitive
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MEMS audio speakers * J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-29 Meera Garud, Rudra Pratap
Miniaturization of electro-mechanical sensors and actuators has benefited from an advancement in CMOS technology over the years. However, miniaturization of audio speakers has seen considerable development only in the recent times. This paper reviews the developments in micro-electro-mechanical-systems (MEMS) audio speaker research and the initial commercial products available in the market. At first
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Combination of anti-miR19a-3p polyplex plus doxorubicin for breast cancer in 2D culture and apoptosis assay in 3D spheroids in a microwell device J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-28 Behjat Kheiri Yeghaneh Azar, Mitra Nourbakhsh, M R Nasiraee, Kazem Mousavizadeh, Zahra Madjd, Mohammad Ajoudanian, Sara Saeedi, Amirhossein Vahabi, Michael R Hamblin, Mahdi Karimi
One of the most common cancers and a main cause of death worldwide among women is breast cancer (BC). Combination therapy is being widely investigated to reduce the dose of chemotherapy drugs, prevent the development of drug resistance, and improve treatment outcomes. Here we tested PEI-PBA-SAP-F15 (PPSF) polymeric nanoparticles to efficiently deliver a microRNA antagonist (anti-miR19a-3p) to BC cell
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Precisely controlled batch-fabrication of highly sensitive co-resonant cantilever sensors from silicon-nitride J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-28 Ioannis Lampouras, Mathias Holz, Steffen Strehle, Julia Körner
Dynamic-mode cantilever sensors are based on the principle of a one-side clamped beam being excited to oscillate at or close to its resonance frequency. An external interaction on the cantilever alters its oscillatory state, and this change can be detected and used for quantification of the external influence (e.g. a force or mass load). A very promising approach to significantly improve sensitivity
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Transillumination lab-on-a-chip cytometer with silicon/glass membrane for image-based porcine oocyte deformation characterisation J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-28 Aleksandra Pokrzywnicka, Danylo Lizanets, Rafał Walczak
Transillumination microscopes, often with a simple lens-free optical configuration, combined with lab-on-a-chip devices are useful tools for the characterisation of various biological samples. A key issue with these devices is light transparency across a lab-on-a-chip structure. In this work we achieved this by embedding a glass window in a silicon membrane. Despite light transmission, the membrane
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Damping of 3D-printed polymer microbeam resonators J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-28 Jikke de Winter, Tomás Manzaneque, Murali Krishna Ghatkesar
The emerging high-resolution 3D printing technique called two-photon polymerization (2PP) enables to print devices bottom-up rapidly, contrary to the top–down lithography-based fabrication methods. In this work, various polymer microbeams are 3D printed and their resonant characteristics are analyzed to understand the origin of damping. The 2PP printed polymer resonators have shown less damping than
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A vision sensor for simultaneous imaging and distance sensing in real-time J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-28 Keewoong Haan, Kukjin Chun, Byung-Gook Park, Hyeon Cheol Kim, Bonghwan Kim
A vision sensor for simultaneous imaging and distance sensing is proposed herein. This vision sensor uses two images with a depth of field by two different aperture sizes to extract distance data. The aperture was fabricated through the microelectromechanical systems process. The optical parameter related to making a blur was precisely selected to reduce the active voltage and response time. The aperture
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Displacement of PAMAM-Au via acoustic streaming on an electrochemical immunosensing platform J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-28 Noor Syamila, Amir Syahir Amir Hamzah, Thomas Laurell, Yusran Sulaiman, Shinya Ikeno, Wen Siang Tan, Asilah Ahmad Tajudin
The displacement of an electroactive monitoring agent, i.e., polyamidoamine dendrimers encapsulated gold nanoparticles (PAMAM-Au) upon the presence of a target antibody via acoustic streaming has been studied. Acoustic streaming has been used to improve the mass transfer and reduce the sample incubation rate, thus this study investigated its ability in enhancing the PAMAM-Au displacement efficiency
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High throughput microfluidic drug screening system for corneal epithelial wound healing J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-16 Rina Lee, Hongbin Kim, Hoon Kim, Jinho Lee, Kyong Jin Cho, Jeongyun Kim
In this study, we developed a microfluidic in vitro wound healing model to overcome the existing limitations of traditional experimental methods in quantifying cell migration. We manufactured a microfluidic system equipped with a gradient concentration generator to control the reagent density and with microvalves so the wound masking pattern could be automatically controlled by a programmable Arduino
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Fabrication and characterization of suspended La0.7Sr0.3MnO3 nanofibers for high-sensitive and fast-responsive infrared bolometer J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-16 Nirupam Paul, Sudharsan Vadnala, Satish Bonam, Amit Agrawal, Siva R K Vanjari, Shiv Govind Singh
La1−x Sr x MnO3 manganite oxides have shown great potential for infrared (IR) sensing. In this study, La0.7Sr0.3MnO3 (LSMO) nanofibers, synthesized by a simple electrospinning process, are suspended between gold interdigitated electrode (IDE). These electrodes, which acts as a supporting platform for the dangling nanofiber, are microelectromechanical systems based that can be fabricated quickly and
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Micromachining of nickel and nickel-based alloy surfaces using composite signal J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-09 Xin Wang, Yan Peng
Electrochemical micromachining refers an unconventional technology in the field of machining. With this technology, the ultrashort pulse power supplies are extensively used to address the issue of excessive machining of non-processing areas. However, the reduction of pulse duration is the only effective strategy to enhance the processing accuracy in ultra-short pulse electrochemical microfabrication
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Triaxial piezoresistive force sensor probe with high sensitivity and stiffness using 3D notch structure J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-11-02 Hidetoshi Takahashi, Yusuke Takei, Kentaro Noda, Kiyoshi Matsumoto, Isao Shimoyama
This paper proposes a microelectromechanical system triaxial piezoresistive force sensor probe with high sensitivity and stiffness. The sensor probe is composed of a cantilever and four supporting beams. Two of the four beams had horizontal notch parts at the root, and sidewall-doped piezoresistors were utilised to detect the in-plane deformation. There was a vertical notch at the root of the remaining
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A two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers arrays with improved cross-correlation method J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-10-20 Linjin Shi, Mengjiao Qu, Dongze Lv, Weiting Liu, Jin Xie
This paper presents a highly accurate two-channel ultrasonic flowmeter based on AlN piezoelectric micromachined ultrasonic transducers (PMUTs) to measure flow rate in small-diameter pipes (9.6 mm). The ultrasonic transducers consist of four 10 by 10 PMUTs arrays with resonant frequency of 1 MHz in air. The ultrasonic transducers are excited by continuous sine voltage, and the transmitted and received
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Statics and dynamics of an underwater electrostatic curved electrode actuator with rough surfaces J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-10-18 Melinda A Lake-Speers, Sindhu Preetham Burugupally, David J Hoelzle
Here, we present a model, design, static and dynamic testing, and analysis of an electrostatic curved electrode actuator in deionized water. The actuator is integrated within a microfluidic device designed for high throughput cell sorting. The actuator shifts the bifurcation point of a Y-shaped microfluidic channel to simultaneously increase the width of one channel while decreasing the width of another
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A simple electrode insulation and channel fabrication technique for high-electric field microfluidics J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-10-16 Gaurav Anand, Samira Safaripour, Jaynie Tercovich, Jenna Capozzi, Mark Griffin, Nathan Schin, Nicholas Mirra, Craig Snoeyink
A simple and robust electrode insulation technique that can withstand a voltage as high as 1000V , which is equivalent to an electric field strength of ∼1 MV m−1 across a 10μm channel filled with an electrolyte of conductivity ∼0.1 S m−1, i.e. higher than sea water’s conductivity, is introduced. A multi-dielectric layers approach is adopted to fabricate the blocked electrodes, which helps reduce
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Development of a piston-actuated 3D bio-printer with performance prediction system for the reliable printing of tubular structures J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-10-11 Kun Liu, Chenghao Yang, Jinmin Li, Gang Ling, Shaoping Xiong
3D bio-printing is a promising approach for creating tubular structures within the human body by precisely controlling the distribution of cells. While several 3D bio-printers have been developed for printing tubular structures, achieving reliable and repeatable construction of effective human tubular structures remains a challenge. This paper presents a piston-actuated 3D bio-tubular structures printer
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Highly-sensitive expandable microsphere-based flexible pressure sensor for human–machine interaction J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-10-09 Ye Wang, Shengshun Duan, Jiachen Liu, Fangzhi Zhao, Pinzhen Chen, Qiongfeng Shi, Jun Wu
Flexible microstructural pressure sensors (FMPSs) have been widely used in different areas including health monitoring, human–machine interaction and electronic skin for their good reliability, easy fabrication, and highly sensitive sensing performance. Although the use of a sensing layer with microstructure improves the sensor sensitivity, it also results in limited sensitive pressure range, slow
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MXene (Ti3C2T x )/TMD (ReSe2) nanohybrid-based flexible electromechanical sensors for cervical collar strain and shoulder load detection applications J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-09-29 Vivek Adepu, Manav Tathacharya, Raghuram C S, Parikshit Sahatiya
The possibly complex impacts of volunteer’s heavy backpacks, chronic neck pain are significant concerns and must be considered by the scientific and academic community. However already existing several alert systems can tackle these issues, but the evaluation approaches are costly and complicated. In this regard, ReSe2/Ti3C2T x nanohybrid based flexible sensors were fabricated by low-cost vacuum filtration
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Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-09-29 Satish K Verma, Bhaskar Mitra
Direction and analog deflection control, as well as low voltage digital switching are the most desirable attributes in electrostatic actuators for current MEMS applications. In this work we show how internal dielectric transduction can be used to reduce pull-in voltages without reducing the air gap, and to effect bi-directional actuation. The actuator is a metal–dielectric–metal sandwich. For hybrid
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Experimental and statistical investigation into surface characteristics in micro milling of bottom pouring/gravity stir cast Al6061 alloy J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-09-28 Sunil Rawal, Mayank Kumar, Ajay M Sidpara, Jinu Paul
Micro milling offers the best way to create micro channels; however, the burr formation and surface roughness of the micro channel are difficult to control. Micro channel fabrication and their characterization of stir cast Al6061 are rarely investigated. In the present study, Al6061 alloy was processed by the bottom pouring stir casting method. The micro channels were fabricated on a base and stir
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Experimental and simulation investigation for imprinting and buckling of V-groove/wrinkles hierarchical array J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-09-26 Nianqiang Zhang, Jin Ji, Jilai Wang, Zhenyu Shi, Chengpeng Zhang
Abstract With the in-depth development and continuous innovation of micro and nano manufacturing technology, flexible strain sensors are more and more widely used in various fields, including soft robots, smart clothing and so on, and high-performance sensors are more in demand. An efficient tactic for enhancing the performance of flexible strain sensors is to design and create hierarchical structures
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Micromachined piezoelectric Lamb wave resonators: a review J. Micromech. Microeng. (IF 2.3) Pub Date : 2023-09-22 Xianzheng Lu, Hao Ren
With the development of next-generation wireless communication and sensing technologies, there is an increasing demand for high-performance and miniaturized resonators. Micromachined piezoelectric Lamb wave resonators are becoming promising candidates because of their multiple vibration modes, lithographically defined frequencies, and small footprint. In the past two decades, micromachined piezoelectric