7 September 2023 On-chip long-wave infrared gas sensor based on subwavelength grating waveguide
Jie Liao, Dong Zhang, Yuefeng Wang, Pengjun Wang, Qiang Fu, Shixun Dai, Weiwei Chen, Lingxiao Ma, Jun Li, Tingge Dai, Jianyi Yang
Author Affiliations +
Abstract

A long-wave infrared (LWIR) on-chip gas sensor based on subwavelength grating waveguide is proposed. By optimizing the grating structural parameters, the corresponding slow-light region is overlapped with the absorption spectrum of methane, which can greatly improve the light–gas interaction to achieve excellent sensing performance. The presented waveguide gas sensor is designed to operate at the wavelength of 7.70 μm, which corresponds to the methane absorption peak in the LWIR and exhibits a high slow-light enhancement factor of 7.514. The related sensitivity and limit of detection are, respectively, 26.54393 and 0.1327 ppm.

© 2023 Society of Photo-Optical Instrumentation Engineers (SPIE)
Jie Liao, Dong Zhang, Yuefeng Wang, Pengjun Wang, Qiang Fu, Shixun Dai, Weiwei Chen, Lingxiao Ma, Jun Li, Tingge Dai, and Jianyi Yang "On-chip long-wave infrared gas sensor based on subwavelength grating waveguide," Journal of Nanophotonics 17(3), 036011 (7 September 2023). https://doi.org/10.1117/1.JNP.17.036011
Received: 12 June 2023; Accepted: 21 August 2023; Published: 7 September 2023
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Waveguides

Long wavelength infrared

Gas sensors

Waveguide sensors

Infrared sensors

Infrared radiation

Absorption

Back to Top