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Effect of magnetic field due to permanent magnets on microwave discharge plasma

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Abstract

In this work, optical emission spectroscopy (OES) is used to investigate the effect of the magnetic field caused by permanent magnets on the 2.45 GHz argon microwave plasma discharge at low pressure. For this purpose, the characteristics of the plasma such as electron temperature and electron density have been obtained and compared in two cases, with and without the presence of magnetic field. The results show that in the argon plasma in the presence of 875 G magnetic field and at 5.4 × 10–3 mbar pressure, the electron density and temperature reached to about 1.75 × 1011 cm−3 and 1.4 eV, respectively. However, in the absence of the magnetic field, the obtained values for electron density and temperature are about 0.75 × 1011 cm−3 and 0.62 eV, respectively. In fact, using the magnetic field produced by two permanent magnets, a significant increase in the density of electrons can be observed. We have compared our experimental results with numerical simulations. In this way, the microwave plasma is modeled with finite element method using COMSOL multi-physics software, which shows good agreement between simulation and experimental results.

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The data that support the findings of this study are available from the corresponding author upon reasonable request.

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Authors and Affiliations

  1. Plasma and Nuclear Fusion Research School, Nuclear Science and Technology Research Institute, P. O. Box 14399-51113, Tehran, Iran

    Zohreh Dehghani, Elnaz Khalilzadeh, Narges Razavinia & Amir Chakhmachi

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  1. Zohreh Dehghani
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  2. Elnaz Khalilzadeh
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  3. Narges Razavinia
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  4. Amir Chakhmachi
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The authors have equal contribution to the study conception, design, material preparation, data collection, analysis and writing. All authors read and approved the final manuscript.

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Correspondence to Elnaz Khalilzadeh.

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Dehghani, Z., Khalilzadeh, E., Razavinia, N. et al. Effect of magnetic field due to permanent magnets on microwave discharge plasma. Indian J Phys (2023). https://doi.org/10.1007/s12648-023-03046-7

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