Abstract
The present article is the second part of our study of the nonlinear dynamics of parametrically excited bending vibrations of a microbeam fixed at both ends, a basic sensitive element of a promising class of microsensors of various physical quantities, under laser thermo-optical action in the form of periodically generated pulses acting on a certain part of the surface of the beam element. The conceptual technical feasibility of laser generation of parametric oscillations of high-Q microresonators without implementation of scenarios with the loss of elastic stability of the sensitive element or unacceptable heating is shown. The nature of the zone of the primary parametric resonance is analyzed analytically. The resonant characteristics of the system are constructed in a geometrically non-linear formulation corresponding to the Bernoulli–Euler beam model.
REFERENCES
R. I. Vorobyev, I. V. Sergeichev, A. A. Karabutov, E. A. Mironova, E. V. Savateeva, and I. Sh. Akhatov, “Application of the optoacoustic method to assess the effect of voids on the crack resistance of structural carbon plastics,” Acoust. Phys. 66, 132–136 (2020). https://doi.org/10.1134/S1063771020020153
G. Yan, S. Raetz, N. Chigarev, Ja. Blondeau, V. E. Gusev, and V. Tournat, “Cumulative fatigue damage in thin aluminum films evaluated non-destructively with lasers via zero-group-velocity Lamb modes,” NDT E Int. 116, 102323 (2020). https://doi.org/10.1016/j.ndteint.2020.102323
Yu. Pan, C. Rossignol, and B. Audoin, “Acoustic waves generated by a laser line pulse in cylinders; Application to the elastic constants measurement,” J. Acoust. Soc. Am. 115, 1537–1545 (2004). https://doi.org/10.1121/1.1651191
G. Chow, E. Uchaker, G. Cao, and Ju. Wang, “Laser-induced surface acoustic waves: An alternative method to nanoindentation for the mechanical characterization of porous nanostructured thin film electrode media,” Mech. Mater. 91, 333–342 (2015). https://doi.org/10.1016/J.MECHMAT.2015.10.005
A. Champion and Y. Bellouard, “Direct volume variation measurements in fused silica specimens exposed to femtosecond laser,” Opt. Mater. Express 2, 789–798 (2012). https://doi.org/10.1364/OME.2.000789
P. H. Otsuka, S. Mezil, O. Matsuda, M. Tomoda, A. A. Maznev, T. Gan, N. Fang, N. Boechler, V. E. Gusev, and O. B. Wright, “Time-domain imaging of gigahertz surface waves on an acoustic metamaterial,” New J. Phys. 20, 013026 (2018). https://doi.org/10.1088/1367-2630/AA9298
C. Li, G. Guan, F. Zhang, G. Nabi, R. K. Wang, and Z. Huang, “Laser induced surface acoustic wave combined with phase sensitive optical coherence tomography for superficial tissue characterization: A solution for practical application,” Biomed. Opt. Express 5, 1403–1418 (2014). https://doi.org/10.1364/BOE.5.001403
L. M. Phinney, K. A. Klody, Jo. T. Sackos, and Je. A. Walraven, “Damage of MEMS thermal actuators heated by laser irradiation,” in Reliability, Packaging, Testing and Characterization of MEMS/MOEMS IV: Proc. MOEMS-MEMS Micro and Nanofabrication, San Jose, Calif., 2005; Proc. SPIE 5716, 81–88 (2005). https://doi.org/10.1117/12.594408
J. R. Serrano and L. M. Phinney, “Displacement and thermal performance of laser-heated asymmetric MEMS actuators,” J. Microelectromech. Syst. 17, 166–174 (2008). https://doi.org/10.1109/JMEMS.2007.911945
A. Mai, C. Bunce, R. Hübner, D. Pahner, and U. A. Dauderstädt, “In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation,” J. Micro/Nanolithogr., MEMS MOEMS 15, 035502 (2016). https://doi.org/10.1117/1.JMM.15.3.035502
J. D. Zook, D. W. Burns, W. R. Herb, H. Guckel, J. W. Kang, and Y. Ahn, “Optically excited self-resonant microbeams,” Sens. Actuators, A 52, 92–98 (1996). https://doi.org/10.1016/0924-4247(96)80131-2
T. Yang and Y. Bellouard, “Laser-induced transition between nonlinear and linear resonant behaviors of a micromechanical oscillator,” Phys. Rev. Appl. 7, 064002 (2017). https://doi.org/10.1103/PhysRevApplied.7.064002
R. J. Dolleman, S. Houri, A. Chandrashekar, F. Alijani, H. S. J. van der Zant, and P. G. Steeneken, “Opto-thermally excited multimode parametric resonance in graphene membranes,” Sci. Rep. 8, 9366 (2018). https://doi.org/10.1038/s41598-018-27561-4
A. T. Zehnder, R. H. Rand, and S. Krylov, “Locking of electrostatically coupled thermo-optically driven MEMS limit cycle oscillators,” Int. J. Non-Linear Mech. 102, 92–100 (2018). https://doi.org/10.1016/J.IJNONLINMEC.2018.03.009
A. Bhaskar, B. Shayak, R. H. Rand, and A. T. Zehnder, “Synchronization characteristics of an array of coupled MEMS limit cycle oscillators,” Int. J. Non-Linear Mech. 128, 103634 (2021). https://doi.org/10.1016/j.ijnonlinmec.2020.103634
N. F. Morozov, D. A. Indeitsev, A. V. Lukin, I. A. Popov, O. V. Privalova, and L. V. Shtukin, “Stability of the Bernoulli–Euler beam in coupled electric and thermal fields,” Dokl. Phys. 63, 342–347 (2018). https://doi.org/10.1134/S1028335818080086
N. F. Morozov, D. A. Indeitsev, A. V. Lukin, I. A. Popov, O. V. Privalova, B. N. Semenov, and L. V. Shtukin, “Bernoulli–Euler beam under action of a moving thermal source: characteristics of the dynamic behavior,” Dokl. Phys. 64, 185–188 (2019). https://doi.org/10.1134/S1028335819040050
N. F. Morozov, D. A. Indeitsev, A. V. Lukin, I. A. Popov, O. V. Privalova, and L. V. Shtukin, “Stability of the Bernoulli–Euler beam under the action of a moving thermal source,” Dokl. Phys. 65, 67–71 (2020). https://doi.org/10.1134/S102833582002007X
N. F. Morozov, D. A. Indeitsev, A. V. Lukin, I. A. Popov, and L. V. Shtukin, “Nonlinear interaction of longitudinal and transverse vibrations of a rod at an internal combinational resonance in view of opto-thermal excitation of N/MEMS,” J. Sound Vib. 509, 116–247 (2021). https://doi.org/10.1016/j.jsv.2021.116247
N. F. Morozov, D. A. Indeitsev, A. V. Lukin, I. A. Popov, and L. V. Shtukin, “Nonlinear modal interaction between longitudinal and bending vibrations of a beam resonator under periodic thermal loading,” Vestn. St. Petersburg Univ.: Math. 55, 212–228 (2022). https://doi.org/10.1134/S106345412202008X
N. F. Morozov, D. A. Indeitsev, A. V. Lukin, I. A. Popov, and L. V. Shtukin, “On opto-thermally excited parametric oscillations of microbeam resonators. I,” Vestn. St. Petersburg Univ.: Math. 56, 231–244 (2023). https://doi.org/10.1134/S1063454123020127
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This work was supported by a grant from the Council for Grants of the President of the Russian Federation for State Support of Young Russian Scientists MK-4577.2022.1.1.
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Translated by M. Shmatikov
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Morozov, N.F., Indeitsev, D.A., Lukin, A.V. et al. On Thermo-Optically Excited Parametric Oscillations of Microbeam Resonators. II. Vestnik St.Petersb. Univ.Math. 56, 446–458 (2023). https://doi.org/10.1134/S1063454123040106
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DOI: https://doi.org/10.1134/S1063454123040106