16 February 2024 High-Q-factor multiple Fano resonance for sensitive refractive index sensors based on all-dielectric metasurface
Zuxiong Liao, Yiping Huo, Tong Liu, Chen Zhao, Tao Zhang, Congmu Xu, Zhongyue Zhang
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Abstract

High-performance sensors can be efficiently realized with an all-dielectric metasurface using high-Q-factor Fano resonance. In this study, a numerical analysis of an all-dielectric metasurface with two square holes and one rectangular hole was conducted. Multiple Fano resonances with a high Q-factor and modulation depth were excited by a toroidal dipole, an electric quadrupole, and a magnetic dipole by breaking the symmetry of the structure. According to the computed results, the modulation depth approached 100%, and the maximum Q-factor reached 90,048. The sensing performance of the structure is also discussed. The structure had a maximum sensitivity and figure of merit of 275 nm/RIU and 1833 RIU1, respectively. Owing to the unique structure, multiple Fano resonances can be achieved, with applications in multiwavelength communication, multichannel nanosensors, and optical modulators. These resonances have high Q-factors, high modulation depths, and small linewidths.

© 2024 Society of Photo-Optical Instrumentation Engineers (SPIE)
Zuxiong Liao, Yiping Huo, Tong Liu, Chen Zhao, Tao Zhang, Congmu Xu, and Zhongyue Zhang "High-Q-factor multiple Fano resonance for sensitive refractive index sensors based on all-dielectric metasurface," Journal of Nanophotonics 18(1), 016007 (16 February 2024). https://doi.org/10.1117/1.JNP.18.016007
Received: 21 September 2023; Accepted: 29 January 2024; Published: 16 February 2024
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KEYWORDS
Refractive index

Magnetism

Modulation

Sensors

Dielectrics

Silicon

Optical communications

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