Local step-flow dynamics in thin film growth with desorption

Xiaozhi Zhang, Jeffrey G. Ulbrandt, Peco Myint, Andrei Fluerasu, Lutz Wiegart, Yugang Zhang, Christie Nelson, Karl F. Ludwig, and Randall L. Headrick
Phys. Rev. Materials 8, 033403 – Published 20 March 2024

Abstract

Desorption of deposited species plays a role in determining the evolution of surface morphology during crystal growth when the desorption time constant is short compared with the time to diffuse to a defect site, step edge, or kink. However, experiments to directly test the predictions of these effects are lacking. Novel techniques such as in situ coherent x-ray scattering can provide significant new information. Herein we present x-ray photon correlation spectroscopy (XPCS) measurements during diindenoperylene (DIP) vapor deposition on thermally oxidized silicon surfaces. DIP forms a nearly complete two-dimensional first layer over the range of temperatures studied (40–120C), followed by mounded growth during subsequent deposition. Local step flow within mounds was observed, and we find that there was a terrace-length-dependent behavior of the step edge dynamics. This led to unstable growth with rapid roughening (β>0.5) and deviation from a symmetric error-function-like height profile. At high temperatures, the grooves between the mounds tend to close up leading to nearly flat polycrystalline films. Numerical analysis based on a (1+1)-dimensional model suggests that terrace-length dependent desorption of deposited ad-molecules is an essential cause of the step dynamics, and it influences the morphology evolution.

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  • Received 3 June 2023
  • Accepted 26 February 2024

DOI:https://doi.org/10.1103/PhysRevMaterials.8.033403

©2024 American Physical Society

Physics Subject Headings (PhySH)

Condensed Matter, Materials & Applied Physics

Authors & Affiliations

Xiaozhi Zhang1, Jeffrey G. Ulbrandt1, Peco Myint2,3, Andrei Fluerasu4, Lutz Wiegart4, Yugang Zhang4, Christie Nelson4, Karl F. Ludwig2,5, and Randall L. Headrick1,*

  • 1Department of Physics and Materials Science Program, University of Vermont, Burlington, Vermont 05405, USA
  • 2Division of Materials Science and Engineering, Boston University, Boston, Massachusetts 02215, USA
  • 3X-ray Science Division, Argonne National Laboratory, Lemont, Illinois 60439, USA
  • 4National Synchrotron Light Source II, Brookhaven National Lab, Upton, New York 11973, USA
  • 5Department of Physics, Boston University, Boston, Massachusetts 02215, USA

  • *rheadrick@uvm.edu

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Vol. 8, Iss. 3 — March 2024

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