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Effect of MoN on the structure and characteristics of MoN/ZrMoN bi-layer nitride films

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Abstract

Multi-alloy-modified film is used to protect the surface of tools and components. MoN/ZrMoN bi-layer films are deposited by sputtering. The effect of the MoN deposition time and the DC power for the Zr target on the structure and mechanical performance of the coated films is studied. The ZrMoN films correspond to the (111), (200) and (220) crystal planes of the FCC (NaCl) structures. The diffraction peaks for the (111) plane gradually shift to lower 2θ values as the Zr content is increased. For a MoN buffer layer with a thickness of ~393 nm, the ZrMoN film has a hardness of 12.53 GPa and a coefficient of friction of 0.42. As the DC power for the Zr target is increased to 200 W, the e hardness and elastic recovery for the MoN/ZrMoN bi-layer films are 15.65 GPa and 67.70%, respectively, which are the maximum respective values. The experimental results show that these bi-layer films have good mechanical performance and adhesive strength.

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Acknowledgement

We gratefully acknowledge the support of the Ministry of Science and Technology of the Republic of China through Grant Nos. MOST 111-2637-E-262-002, MOST 111-2221-E-262-005 and NSTC 111-2622-E-262-002.

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Authors and Affiliations

  1. Department of Materials Science and Engineering, National Taiwan University of Science and Technology, Taipei, 10607, Taiwan

    Ding-Chiang Hu & Dong-Hau Kuo

  2. Department of Mechanical Engineering, Lunghwa University of Science and Technology, Taoyuan, 33306, Taiwan

    Chung-Chen Tsao & Chun-Yao Hsu

  3. Department of Mechanical and Mechatronic Engineering, National Taiwan Ocean University, Keelung, 20224, Taiwan

    Jihng-Kuo Ho

  4. Department of Industrial Education, National Taiwan Normal University, Taipei, 10610, Taiwan

    Chin-Guo Kuo

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  1. Ding-Chiang Hu
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  2. Dong-Hau Kuo
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Correspondence to Chun-Yao Hsu.

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Hu, DC., Kuo, DH., Tsao, CC. et al. Effect of MoN on the structure and characteristics of MoN/ZrMoN bi-layer nitride films. Bull Mater Sci 47, 63 (2024). https://doi.org/10.1007/s12034-023-03136-6

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