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On Preferential Sputtering of Alloys under Ion Bombardment

  • Radiophysics, Electronics, Acoustics
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Moscow University Physics Bulletin Aims and scope

Abstract

An analysis of both experimental and theoretical data on the study of preferential sputtering of nickel-based and copper-platinum alloys under ion beam bombardment has been carried out. Contrary to existing models, it has been shown that the main factor determining the process of preferential sputtering is the ratio of the surface binding energies of the components.

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ACKNOWLEDGMENTS

The author expresses gratitude to colleagues A.V. Nazarov and A.E. Ieshkin for their valuable discussions and assistance in preparing the manuscript.

Funding

The research was carried out within the Russian Science Foundation Grant (project no. 21-19-00310).

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Authors and Affiliations

  1. Faculty of Physics, Lomonosov Moscow State University, 119991, Moscow, Russia

    V. S. Chernysh

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  1. V. S. Chernysh
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Correspondence to V. S. Chernysh.

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Chernysh, V.S. On Preferential Sputtering of Alloys under Ion Bombardment. Moscow Univ. Phys. 79, 14–19 (2024). https://doi.org/10.3103/S0027134924700085

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  • DOI: https://doi.org/10.3103/S0027134924700085

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