Abstract
The action of an electron beam on crystals of tetramethylethylenediaminium nitrilotriacetate [HMe2NCH2CH2NMe2H]2+[HN(CH2COOH)(CH2COO)2]–2, ammonium heptamolybdate tetrahydrate (NH4)6Mo7O24‧4H2O, and polymeric zinc nitrilotrimethylenephosphonate trihydrate (ZnH4L‧3H2O)n, on a lamellar crystal of 2,2'-(ethylenedioxy)di(ethylaminium) trifluoroacetate CF3C(O)O‒ +H3N(CH2CH2O)2CH2CH2NH3+‒O(O)CCF3, and on films of the monoethanolaminium salt of ethylenediaminetetraacetic acid [Н3NCH2CH2OH]+2[(OOCCH2)2NCH2CH2N(CH2COOH)2]2– was studied. A Tescan VEGA II electron microscope was used as an exposure tool. The microrelief was examined at magnifications from 500× to 50000×. The survey was carried out at an accelerating voltage of 20 kV and a working distance of 2–8 mm, using secondary (SE) and backscattered (BSE) electron detectors. A copper–nickel alloy and silicate glass were used as the substrate material for the films. The crystals and films were irradiated with an electron beam of various powers, forming an area 20 × 20 μm in size. At low power, the area dimensions are strictly 20 × 20 μm, and the surface remains relatively flat. An increase in the power or in the exposure time while maintaining the power causes an increase in the size by 5 to 34%. The maximum impact causes the formation of defects in the form of cracks, swellings, bubbles, holes, and craters. The elevation of the surface increases with increasing radiation dose.
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ACKNOWLEDGMENTS
Devices of the Center for Shared Use Research and Educational Center “Physics of Solid-State Nanostructures,” Lobachevsky University, were used in the study.
Funding
Studies were performed within the framework of the government assignment, theme no. FFSE-2023-0005: Organic, Organoelement, and Coordination Compounds as Components of Materials for Modern High Technologies, registry no. 123031000051-4, using the equipment of the Analytical Center for Shared Use, Razuvaev Institute of Organometallic Chemistry, Russian Academy of Sciences with the support by the grant “Ensuring the Progress of the Material and Technical Infrastructure of Centers for Shared Use of Scientific Equipment (unique identifier RF-2296.61321X0017, agreement no. 075-15-2021-670). Scanning electron microscopic experiments were performed within the framework of the government assignment for the Institute of Applied Physics, Russian Academy of Sciences, for basic research for the period 2021–2023, theme no. 0030-2021-0025.
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Razov, E.N., Semenov, V.V. Action of an Electron Beam on Crystals and Films of Aminium and Ammonium Salts. Russ J Appl Chem 96, 762–772 (2023). https://doi.org/10.1134/S1070427223070078
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DOI: https://doi.org/10.1134/S1070427223070078