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研討會論文
1.S.-S. Li, “A key more-than-Moore technology: CMOS-MEMS resonant transducers,” Proceedings, 16th International Conference on Nanotechnology (IEEE Nano 2016), Sendai, Japan, Aug. 22-25, 2016, pp. 456-459.
2.M.-H. Li, C.-Y. Liu, C.-Y. Chen, and S.-S. Li, “An 8V 50W 1.2MHz CMOS-MEMS oscillator,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
3.G. Pillai, A. Zope, J. M.-L. Tsai, and S.-S. Li, “3-GHz BAW composite resonators integrated with CMOS in a single-chip configuration,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
4.W.-C. Chiu, M.-H. Li, C.-Y. Chou, and S.-S. Li, “A ring-down technique implemented in CMOS-MEMS resonator circuits for wide-range pressure sensing applications,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
5.C.-Y. Liu, M.-H. Li, C.-Y. Chen, and S.-S. Li, “An ovenized CMOS-MEMS oscillator with isothermal resonator and sub-mW heating power,” Proceedings, 2016 IEEE Int. Frequency Control Symp., New Orleans, LA, May 9-12, 2016.
6.W.-S. Tan, W. G. Fang, G. Pillai, C.-C. Chen, C.-Y. Chen, C.-H. Chin, and S.-S. Li, “Fabrication and characterization of lithium-niobate thin film MEMS piezoelectric resonators,” Proceedings, 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, pp. 1249 (4 pages).
7.G. Pillai, W.-S. Tan, C.-C. Chen, and S.-S. Li, “Modeling of zero TCF and maximum bandwidth orientation for lithium tantalate RF MEMS resonators,” Proceedings, 11th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Matsushima Bay and Sendai MEMS City, Japan, 17-20 April, pp. 1252 (5 pages).
8.E.-C. Chang, C.-C. Chen, and S.-S. Li, “Real-time mass sensing and dynamic impact monitoring of printed pico-liter droplets realized by a thermal-piezoresistive self-sustained oscillator,” Proceedings, 29th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’16), Shanghai, China, Jan. 24-28, 2016, pp. 1078-1081.
9.F.-Y. Lee, K.-C. Liang, E. Cheng, S.-S. Li, and W. Fang, “Acceleration-insensitive fully-decoupled tuning fork (FDTF) MEMS vibratory gyroscope with 1/hr bias instability,” Proceedings, 29th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’16), Shanghai, China, Jan. 24-28, 2016, pp. 946-949.
10.M.-H. Li, C.-Y. Chen, and S.-S. Li, “A reliable CMOS-MEMS platform for titanium nitride composite (TiN-C) resonant transducers with enhanced electrostatic transduction and frequency stability,” Technical Digest, 2015 IEEE International Electron Devices Meeting (IEDM’15), Washington, DC, Dec. 7-9, 2015, pp. 487-490.
11.H.-C. Su, M.-H. Li, and S.-S. Li, “A single-chip oscillator based on a deep-submicron gap CMOS-MEMS resonator array with high-stiffness driving scheme,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 133-136.
12.C.-Y. Chen, M.-H. Li, and S.-S. Li, “Transduction comparison of a resonant transducer realized in a commercially available CMOS-MEMS platform,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 145-148.
13.J. Ren, C.-Y. Liu, and S.-S. Li, “A mode-matching 130-kHz ring-coupled gyroscope with 225 ppm initial driving/sensing mode frequency splitting,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 1057-1060.
14.C.-Y. Chen, M.-H. Li, and S.-S. Li, “Statistical characterization of a CMOS-MEMS resonator for monolithic ovenized oscillator applications,” Tech. Dig., 18th Int. Conf. on Solid-State Sensors & Actuators (Transducers’15), Anchorage, Alaska, June 21-25, 2015, pp. 1965-1968.
15.J.-H. Chang, C.-S. Li, C.-C. Chen, and S.-S. Li, “Performance evaluation of CMOS-MEMS thermal-piezoresistive resonators in ambient pressure for sensor applications,” Proceedings, the 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, Colorado, April 12-16, 2015, pp. 202-204.
16.W.-C. Chiu, M.-H. Li, C.-Y. Chen, and S.-S. Li, “Effects of pressure and bias voltage on the phase noise of CMOS-MEMS oscillators,” Proceedings, 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, Colorado, April 12-16, 2015, pp. 155-157.
17.C.-H. Chin, C.-S. Li, M.-H. Li, and S.-S. Li, “A CMOS-MEMS arrayed RGFET oscillator using a band-to-band tunneling bias scheme,” Proceedings, 28th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’15), Estoril, Portugal, Jan. 18-22, 2015, pp. 988-991.
18.M.-H. Li, C.-S. Li, and S.-S. Li, “Exploring the Q-factor limit of temperature compensated CMOS-MEMS resonators,” Proceedings, 28th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’15), Estoril, Portugal, Jan. 18-22, 2015, pp. 853-856.
19.M.-H. Li, C.-Y. Chen, C.-H. Chin, C.-S. Li, and S.-S. Li, “Optimizing the close-to-carrier phase noise of monolithic CMOS-MEMS oscillators using bias-dependent nonlinearity,” Technical Digest, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014, pp. 558-561.
20.K.-H. Li, C.-C. Chen, M.-H. Li, and S.-S. Li, “A self-sustained nanomechanical thermal-piezoresistive oscillator with ultra-low power consumption,” Technical Digest, 2014 IEEE International Electron Devices Meeting (IEDM’14), San Francisco, CA, Dec. 15-17, 2014, pp. 554-557.
21.Y.-J. Liao, T.-W. Kuo, and S.-S. Li, “Design and characterization of CMOS-MEMS capacitive micromachined ultrasonic transducers,” Proceedings, 8th International Conference on Nano/Molecular Medicine and Engineering (IEEE-NanoMed), Kaohsiung, Taiwan, Nov. 9-12, 2014, pp. 103-104.
22.C.-H. Chin and S.-S. Li, “A CMOS-MEMS arrayed RGFET,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 325-326.
23.M.-H. Li, C.-Y. Chen, and S.-S. Li, “An experimental investigation on the Q-boosted CMOS-MEMS flexural-mode resonator circuits,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 327-328.
24.C.-S. Li, J. Lee, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, P. X.-L. Feng, “Multimode characteristics of high-frequency CMOS-MEMS resonators,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 478-480.
25.C.-S. Li, J. Lee, Z. Wang, M.-H. Li, C.-H. Chin, S.-S. Li, P. X.-L. Feng, “Exploring parametric resonance effects in bulk-mode CMOS-MEMS resonators,” Proceedings, 2014 IEEE Int. Frequency Control Symp., Taipei, Taiwan, May 19-22, 2014, pp. 329-331.
26.C.-Y. Chen, M.-H. Li, C.-H. Chin, C.-S. Li, and S.-S. Li, “Combined electrical and mechanical coupling for mode-reconfigurable CMOS-MEMS filters,” Proceedings, 27th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’14), San Francisco, CA, Jan. 26-30, 2014, pp. 1249-1252.
27.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, C.-C. Chen, and S.-S. Li, “Foundry-CMOS integrated oscillator circuits based on ultra-low power ovenized CMOS-MEMS resonators,” Technical Digest, 2013 IEEE International Electron Devices Meeting (IEDM’13), Washington, DC, Dec. 9-11, 2013, pp. 475-478.
28.S.-S. Li, “CMOS-MEMS resonators and their applications,” Proceedings, the 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 915-921. (Invited)
29.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Enhanced temperature sensitivity of a single CMOS-MEMS resonator via resonant modes in orthogonal axes,” Proceedings, the 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 539-542.
30.C.-S. Li, M.-H. Li, C.-H. Chin, C.-Y. Chen, P. X.-L. Feng, and S.-S. Li, “A piezoresistive CMOS-MEMS resonator with high Q and low TCf,” Proceedings, the 2013 IEEE UFFC Joint Symposia, Prague, Czech Republic, July 21-25, 2013, pp. 425-428.
31.W. Fang, S.-S. Li, C.-L. Cheng, C.-I. Chang, W.-C. Chen, Y.-C. Liu, M.-H. Tsai, and C. Sun, “CMOS MEMS: A key technology towards the “More than Moore” era,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2513-2518.
32.C.-H. Chin, M.-H. Li, and S.-S. Li, “A CMOS-MEMS resonant-gate transistor,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2284-2287.
33.C.-Y. Chen, M.-H. Li, C.-S. Li, and S.-S. Li, “Design and characterization of mechanically-coupled CMOS-MEMS filters,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2288-2291.
34.H. Zhu, C.-H. Chuang, C.-S. Li, M.-H. Li, J. E.-Y. Lee, and S.-S. Li, “The effects of tight capacitive coupling on phase noise performance: A LAMÉ-mode MEMS oscillator study,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2304-2307.
35.W.-C. Chen, M.-H. Li, Y.-C. Liu, D. Weinstein, W. Fang, and S.-S. Li, “Fully differential CMOS-MEMS square-plate oxide resonators with embedded poly-silicon electrodes,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 2292-2295.
36.Y.-C. Liu, M.-H. Tsai, S.-S. Li, and W. Fang, “A fully-differential, multiplex-sensing interface circuit monolithically integrated with tri-axis pure oxide capacitive CMOS-MEMS accelerometers,” Dig. of Tech. Papers, the 17th Int. Conf. on Solid-State Sensors & Actuators (Transducers’13), Barcelona, Spain, June 16-20, 2013, pp. 610-613.
37.S.-S. Li, “Advances of CMOS-MEMS technology for resonator applications,” Proceedings, 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS’13), Suzhou, China, April 7-10, 2013, pp. 520-523. (Invited)
38.C.-C. Chen, H.-T. Yu, K.-H. Lee, and S.-S. Li, “Enhancement of temperature stability via constant structural-resistance control for MEMS resonators,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 765-768.
39.M.-H. Li, C.-S. Li, C.-H. Chin, C.-Y. Chen, and S.-S. Li, “An ultra-low power ovenized CMOS-MEMS resonator monolithically integrated with interface circuits,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 753-756.
40.T.-T. Chen, J.-C. Huang, Y.-C. Peng, C.-H. Chu, C.-H. Lin, E. Cheng, and S.-S. Li, “A 17.6-MHz 2.5V ultra-low polarization voltage MEMS oscillator using an innovative high gain-bandwidth fully differential transimpedance voltage amplifier,” Proceedings, 26th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’13), Taipei, Taiwan, Jan. 20-24, 2013, pp. 741-744.
41.V. Pachkawade, C.-S. Li, and S.-S. Li, “A fully-differential CMOS-MEMS resonator integrated with an on-chip amplifier,” Proceedings, IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
42.H.-H. Lai, W.-C. Chen, and S.-S. Li, “A low-actuation voltage design for RF CMOS-MEMS switches,” Proceedings, IEEE Sensors Conference, Taipei, Taiwan, Oct. 28-31, 2012, pp. 1-4.
43.C.-S. Li, M.-H. Li, and S.-S. Li, “Differential measurement of piezoresistive transduction for silicon-based MEMS resonators,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 593-596.
44.C.-C. Chen, M.-H. Li, W.-C. Chen, H.-T. Yu, and S.-S. Li, “Thermally-actuated and piezoresistively-sensed CMOS-MEMS resonator array using differential-mode operation,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 443-446.
45.W.-C. Chen, W. Fang, and S.-S. Li, “VHF CMOS-MEMS oxide resonators with Q > 10,000,” Proceedings, 2012 IEEE Int. Frequency Control Symp. (IFCS’12), Baltimore, Maryland, May 21-24, 2012, pp. 581-584.
46.M.-H. Li, C.-S. Li, L.-J. Hou, Y.-C. Liu, and S.-S. Li, “A 1.57mW 99dB CMOS transimpedance amplifier for VHF micromechanical reference oscillators,” Proceedings, 2012 IEEE International Symposium on Circuits and Systems (ISCAS’12), Seoul, Korea, May 20-23, pp. 209-212.
47.L.-J. Hou, C.-S. Li, and S.-S. Li, “High-stiffness-driven micromechanical resonator oscillator with enhanced phase noise performance,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 700-703.
48.C.-S. Li, C.-H. Chin, and S.-S. Li, “Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 539-542.
49.C.-C. Chen, H.-T. Yu, and S.-S. Li, “A balanced measurement and characterization technique for thermal-piezoresistive micromechanical resonators,” Proceedings, 25th IEEE Int. Micro Electro Mechanical Systems Conf. (MEMS’12), Paris, France, Jan. 29-Feb. 2, 2012, pp. 377-380.
50.T.-H. Yen, M.-H. Tsai, C.-I Chang, Y.-C. Liu, S.-S. Li, R. Chen, and W. Fang, “Improvement of CMOS-MEMS accelerometer using the symmetric layers stacking design,” Proceedings, IEEE Sensors Conference, Limerick, Ireland, Oct. 28-31, 2011, pp. 145-148.
51.N. Bhalla, S.-S. Li, and D. W.-Y. Chung, “Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk,” Proceedings, 2011 International Semiconductor Conference (CAS’11), Sinaia, Romania, Oct.17-19, 2011, pp. 353-356.
52.C.-S. Li and S.-S. Li, “Capacitive gap-aspect-ratio enhancement using advanced CMOS process for CMOS-MEMS resonators,” Proceedings, 9th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST’11), Hsinchu, Taiwan, June 12-18, 2011, pp. 47-48.
53.Y.-C. Liu, M.-H. Tsai, W.-C. Chen, S.-S. Li, and W. Fang, “High-Q, large-stopband-rejection integrated CMOS-MEMS oxide resonators with embedded metal electrodes,” Dig. of Tech. Papers, the 16th Int. Conf. on Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 934-937.
54.M.-H. Li, W.-C. Chen, and S.-S. Li, “CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance,” Dig. of Tech. Papers, the 16th Int. Conf. on Solid-State Sensors & Actuators (Transducers’11), Beijing, China, June 5-9, 2011, pp. 1500-1503.
55.M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration,” Proceedings, 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum (IFCS’11), San Francisco, May 2-5, 2011, pp. 1-4.
56.W.-C. Chen, W. Fang, and S.-S. Li, “Quasi-linear frequency tuning for CMOS-MEMS resonators,” Proceedings, 24th IEEE Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’11), Cancun, Mexico, January 23-27, 2011, pp.340-343.
57.W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps,” Proceedings, 2010 IEEE Int. Frequency Control Symp. (IFCS’10), Newport Beach, California, June 2-4, 2010, pp. 340-343.
58.W.-C. Chen, C.-S. Chen, K.-A. Wen, L.-S Fan, W. Fang, and S.-S. Li, “A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers,” Proceedings, 23rd Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28, 2010, pp. 204-207.
59.W.-C. Chen, M.-H. Li, W. Fang, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators with frequency tuning capability via modulated boundary conditions,” Proceedings, 23rd Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’10), Hong Kong, Jan. 24-28, 2010, pp. 735-738.
60.Y. Lin, W.-C. Li, I. Gurin, S.-S. Li, Y.-W. Lin, Z. Ren, B. Kim, and C. T.-C. Nguyen, “Digitally-Specified Micromechanical Displacement Amplifiers,” Dig. of Tech. Papers, the 15th Int. Conf. on Solid-State Sensors & Actuators (Transducers’09), Denver, Colorado, June 21-25, 2009, pp. 781-784.
61.S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “An MSI micromechanical differential disk-array filter,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 307-311.
62.W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “UHF nickel micromechanical spoke-supported ring resonators,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 323-326.
63.Y.-W. Lin, Y. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, “Quality factor boosting via mechanically-coupled arraying,” Dig. of Tech. Papers, the 14th Int. Conf. on Solid-State Sensors & Actuators (Transducers’07), Lyon, France, June 10-14, 2007, pp. 2453-2456.
64.S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “A micromechanical parallel-class disk-array filter,” Proceedings, 2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361.
65.L.-W. Hung, C. T.-C. Nguyen, Y. Xie, Y.-W. Lin, S.-S. Li, and Z. Ren, “UHF micromechanical compound-(2,4) mode ring resonators with solid-gap transducers,” Proceedings, 2007 IEEE Int. Frequency Control Symp. (IFCS’07), Geneva, Switzerland, May 29-June 1, 2007, pp. 1370-1375.
66.S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Disk-array design for suppression of unwanted modes in micromechanical composite-array filters,” Proceedings, 19th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’06), Istanbul, Turkey, Jan. 22-26, 2006, pp. 866-869.
67.Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, “Low phase noise array-composite micromechanical wine-glass disk oscillator,” Technical Digest, 2005 IEEE International Electron Devices Meeting (IEDM’05), Washington, DC, Dec. 5-7, 2005, pp. 287-290.
68.S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Small % bandwidth design of a 431-MHz notched-coupled micromechanical hollow-disk ring mixer-filter,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1295-1298.
69.S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Charge-based vibrating micromechanical resonators,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, 1596-1599.
70.Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators,” Proceedings, IEEE International Ultrasonics Symposium (IUS’05), Rotterdam, the Netherlands, Sept. 18-21, 2005, pp. 1592-1595.
71.S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Self-switching vibrating micromechanical filter bank,” Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium (IFCS’05), Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141.
72.Y.-W. Lin, S.-S. Li, Z. Ren, and Clark T.-C. Nguyen, “Vibrating micromechanical resonators with solid dielectric capacitive-transducer gaps,” Proceedings, Joint IEEE International Frequency Control /Precise Time and Time Interval Symposium (IFCS’05), Vancouver, Canada, Aug. 29-31, 2005, pp. 128-134.
73.Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and Clark T.-C. Nguyen, “Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators,” Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’05), Miami Beach, Florida, Jan. 30-Feb. 3, 2005, pp. 219-222.
74.M. A. Abdelmoneum, M. U. Demirci, S.-S. Li, and C. T.-C. Nguyen, “Post-fabrication laser trimming of micromechanical filters,” Technical Digest, IEEE Int. Electron Devices Mtg. (IEDM’04), San Francisco, California, Dec. 13-15, 2004, pp. 32-49.
75.S.-S. Li, M. U. Demirci, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “Bridged micromechanical filters,” Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf. (IFCS’04), Montreal, Canada, Aug. 24-27, 2004, pp. 280-286.
76.Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “60-MHz wine glass micromechanical disk reference oscillator,” Digest of Technical Papers, 2004 IEEE International Solid-State Circuits Conference (ISSCC’04), San Francisco, California, Feb. 15-19, 2004, pp. 322-323.
77.S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and Clark T.-C. Nguyen, “Micromechanical hollow-disk ring resonators,” Proceedings, 17th Int. IEEE Micro Electro Mechanical Systems Conf. (MEMS’04), Maastricht, The Netherlands, Jan. 25-29, 2004 , pp. 821-824.
78.Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “UHF micromechanical extensional wine-glass mode ring resonators,” Technical Digest, 2003 IEEE International Electron Devices Meeting (IEDM’03), Washington, DC, Dec. 8-10, 2003, pp. 953-956.
SCI期刊論文
1.M.-H. Li, C.-Y. Chen, C.-Y. Liu, and S.-S. Li, “A sub-150W BEOL-embedded CMOS-MEMS oscillator with a 138dB ultra-low-noise TIA,” IEEE Electron Device Letters (EDL), vol. 37, no. 5, pp. 648-651, May 2016.
2.C.-Y. Chen, M.-H. Li, C.-H. Chin, and S.-S. Li, “Implementation of a CMOS-MEMS filter through a mixed electrical and mechanical coupling scheme,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 25, no. 2, pp. 262-274, April 2016.
3.T. L. Naing, T. Rocheleau, Z. Ren, S.-S. Li, and C. T.-C. Nguyen, “High-Q UHF spoke-supported ring resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 25, no. 1, pp. 11-29, Feb. 2016.
4.C.-H. Chin, M.-H. Li, C.-Y. Chen, Y.-L. Wang, and S.-S. Li, “A CMOS-MEMS arrayed RGFET oscillator,” J. Micromech. Microeng. (JMM), vol. 25, pp. 115025, Oct. 2015. (Highlights of 2015)
5.M.-H. Li, C.-Y. Chen, W.-C. Chen, and S.-S. Li, “A vertically-coupled MEMS resonator pair for oscillator applications,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 3 pp. 528-530, June 2015.
6.S. Wang, B. Bahr, W.-C. Chen, W. Fang, S.-S. Li, and D. Weinstein, “Temperature coefficient of frequency modeling for CMOS-MEMS bulk mode composite resonator,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 62, no. 6, pp. 1166-1178, June 2015.
7.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 2 pp. 360-372, April 2015.
8.M.-H. Li, C.-Y. Chen, C.-S. Li, C.-H. Chin, and S.-S. Li, “Design and characterization of a dual-mode CMOS-MEMS resonator for TCF manipulation,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 24, no. 2, pp. 446-457, April 2015.
9.J.-Y. Fang, C.-H. Chu, I. Sarang, K.-C. Fang, C.-P. Hsu, Y.-F. Huang, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, Y.-L. Wang, “Electronic hydroxyl radical microsensors based on the conductivity change of polyaniline,” Sensors and Actuators B: Chemical, vol. 208, pp. 99-105, March 2015.
10.C.-S. Li, M.-H. Li, C.-C. Chen, C.-H. Chin, and S.-S. Li, “A low voltage CMOS-MicroElectroMechanical Systems thermal-piezoresistive resonator with Q > 10,000,” IEEE Electron Device Letters (EDL), vol. 36, no. 2, pp. 192-194, Feb. 2015.
11.C.-S. Li, M.-H. Li, and S.-S. Li, “Differentially piezoresistive transduction of high-Q encapsulated SOI-MEMS resonators with sub-100nm gaps,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 62, no. 1, pp. 220-229, Jan. 2015.
12.K.-C. Fang, C.-H. Chu, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Cost-effective and highly sensitive cholesterol microsensors with fast response based on the enzyme-induced conductivity change of polyaniline,” Applied Physics Letters (APL), vol. 105, pp. 113304, Sept. 2014.
13.C.-Y. Chen, M.-H. Li, C.-S. Li, S.-S. Li, “Design and characterization of mechanically-coupled CMOS-MEMS filters for channel-select applications,” Sensors and Actuators A: Physical, vol. 216, pp. 394-404, Sept. 2014.
14.C.-H. Chin, C.-S. Li, M.-H. Li, Y.-L. Wang, and S.-S. Li, “Fabrication and characterization of a charge-biased CMOS-MEMS resonant gate field effect transistor,” J. Micromech. Microeng. (JMM), vol. 24, pp. 095005, July 2014. (Highlights of 2014)
15.K.-C. Fang, C.-P. Hsu, Y.-W. Kang, J.-Y. Fang, C.-C. Huang, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, and Y.-L. Wang, “Realization of an ultra-sensitive hydrogen peroxide sensor with conductance change of horseradish peroxidase-immobilized polyaniline and investigation of the sensing mechanism,” Biosensors and Bioelectronics, vol. 55, pp. 294-300, May 2014.
16.Y.-R. Hsu, Y.-W. Kang, J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-k. Chang, C.-C. Huang, C.-P. Hsu, T.-h. Huang, Y.-F. Huang, Y.-C. Sun, C.-H. Hsu, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, F. Ren, and Y.-L. Wang, “Investigation of C-terminal domain of SARS nucleocapsid protein–Duplex DNA interaction using transistors and binding-site models,” Sensors and Actuators B: Chemical, vol. 193, pp. 334- 339, March 2014.
17.C.-S. Li, M.-H. Li, C.-H. Chin, and S.-S. Li, “Differentially piezoresistive sensing for CMOS-MEMS resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 6, pp. 1361-1372, Dec. 2013.
18.J.-Y. Fang, G.-Y. Lee, J.-I. Chyi, C.-P. Hsu, Y.-W. Kang, K.-C. Fang, W.-L. Kao, D.-J. Yao, C.-H. Hsu, Y.-F. Huang, C.-C. Chen, S.-S. Li, J.-A. Yeh, F. Ren, and Y.-L. Wang, “Viscosity-dependent drain current noise of AlGaN/GaN high electron mobility transistor in polar liquids,” J. Appl. Phys., vol. 114, 204503, Nov. 2013.
19.Y.-C. Liu, M.-H. Tsai, W.-C. Chen, M.-H. Li, S.-S. Li, and W. Fang, “Temperature-compensated CMOS-MEMS oxide resonators,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 22, no. 5, pp. 1054-1065, Oct. 2013.
20.S.-S. Li and C.-M. Cheng, “Analogy among microfluidics, micromechanics, and microelectronics,” Lab on a Chip, vol. 13, pp. 3782-3788, Oct. 2013.
21.V. Pachkawade, M.-H. Li, C. S. Li, and S.-S. Li, “A CMOS-MEMS resonator integrated system for oscillator application,” IEEE Sensors Journal, vol. 13, no. 8, pp. 2882-2889, Aug. 2013.
22.C.-C. Huang, G.-Y. Lee, J.-I. Chyi, H.-T. Cheng, C.-P. Hsu, Y.-R. Hsu, C.-H. Hsu, Y.-F. Huang, Y.-C. Sun, C.-C. Chen, S.-S. Li, J. A. Yeh, D.-J. Yao, F. Ren, Y.-L. Wang, “AlGaN/GaN high electron mobility transistors for protein–peptide binding affinity study,” Biosensors and Bioelectronics, vol. 41, pp. 717-722, March 2013.
23.M.-H. Li, W.-C. Chen, and S.-S. Li, “Realizing deep-submicron gap spacing for CMOS-MEMS resonators,” IEEE Sensors Journal, vol. 12, no. 12, pp. 3399-3407, Dec. 2012.
24.Y.-C. Lee, M.-H. Li, Y. T. Cheng, W. Hsu, and S.-S. Li, “Electroplated Ni-CNT nanocomposite for micromechanical resonator applications,” IEEE Electron Device Letters (EDL), vol. 33, no. 6, pp. 872-874, June 2012.
25.W.-C. Chen, W. Fang, and S.-S. Li, “High-Q integrated CMOS-MEMS resonators with deep-submicron gaps and quasi-linear frequency tuning,” IEEE/ASME J. Microelectromech. Syst. (JMEMS), vol. 21, no. 3, pp. 688-701, June 2012.
26.W.-C. Chen, M.-H. Li, Y.-C. Liu, W. Fang, and S.-S. Li, “A fully-differential CMOS-MEMS DETF oxide resonator with Q > 4,800 and Positive TCF,” IEEE Electron Device Letters (EDL), vol. 33, no. 5, pp. 721-723, May 2012.
27.L.-J. Hou and S.-S. Li, “High-stiffness driven micromechanical resonators with enhanced power handling,” Applied Physics Letters (APL), vol. 100, no. 13, pp. 131908, March 2012. (Selected for the issue of Virtual Journal of Nanoscale Science & Technology)
28.M.-H. Li, W.-C. Chen, and S.-S. Li, “Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 59, no. 3, pp. 346-357, March 2012.
29.C.-S. Li, L.-J. Hou, and S.-S. Li, “Advanced CMOS-MEMS resonator platform,” IEEE Electron Device Letters (EDL), vol. 33, no. 2, pp. 272-274, Feb. 2012.
30.W.-C. Chen, W. Fang, and S.-S. Li, “A generalized CMOS-MEMS platform for micromechanical resonators monolithically integrated with circuits,” J. Micromech. Microeng. (JMM), vol. 21, no. 6, pp. 065012, May 2011.
31.C.-H. Chin, T.-F. Lu, J.-C. Wang, J.-H. Yang, C.-E. Lue, C.-M. Yang, S.-S. Li, and C.-S. Lai, “Effects of CF4 Plasma Treatment on pH and pNa Sensing Properties of Light-Addressable Potentiometric Sensor with a 2-nm-Thick Sensitive HfO2 Layer Grown by Atomic Layer Deposition,” Japanese Journal of Applied Physics (JJAP), vol. 50, no. 4, pp. 04DL06-1-5, April 2011.
32.Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, “1.52-GHz micromechanical extensional wine-glass mode ring resonators,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (T-UFFC), vol. 55, no. 4, pp. 890-907, April 2008.
33.Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, “Series-resonant VHF micromechanical resonator reference oscillators,” IEEE J. Solid-State Circuits (JSSC), vol. 39, no. 12, pp. 2477-2491, Dec. 2004.
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