Abstract. Background: The piezoelectric microvibratory stage as a microelectromechanical system (MEMS) actuator can tilt around the X  /  Y axis and translate along the Z axis. However, when the vibratory stage is tilted around the X axis, it also has an undesirable tilting angle around the Y axis. It means that the X axis tilting and the Y axis tilting are not independent; therefore, it is significant to eliminate the coupling of two motions. Aim: The coupling of X  /  Y tilting motion is studied theoretically and decoupled by optimization of structural parameters. Approach: A structural model was established to analyze the reasons of the X  /  Y tilting coupling. Reasonable structure parameters of L-shaped piezoelectric beam were designed to eliminate the off-axis errors caused by X  /  Y tilting coupling. Results: The reason of X  /  Y tilting coupling is that the stiffness of the L-shaped piezoelectric support beam mismatch in the X axis and Y axis directions. The appropriate width ratio of the two segments of the L-shaped piezoelectric beam can reduce the off-axis error effectively. Conclusions: The test results show that the piezoelectric MEMS vibratory stage can achieve X  /  Y tilting motion with the relative off-axis error only at 1%.

中文翻译：

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改进的 MEMS 压电振动台，减少了离轴误差

摘要。背景：作为微机电系统 (MEMS) 致动器的压电微振动平台可以围绕 X / Y 轴倾斜并沿 Z 轴平移。然而，当振动台围绕 X 轴倾斜时，它也具有围绕 Y 轴的不希望的倾斜角。这意味着X轴倾斜和Y轴倾斜不是独立的；因此，消除两个运动的耦合具有重要意义。目的：从理论上研究X/Y倾斜运动的耦合，通过结构参数优化解耦。方法：建立结构模型，分析X/Y倾斜联轴器产生的原因。设计合理的L型压电梁结构参数，消除X/Y倾斜耦合引起的离轴误差。结果：X / Y倾斜耦合的原因是L形压电支撑梁在X轴和Y轴方向上的刚度不匹配。L形压电梁两段的适当宽度比可以有效地减小离轴误差。结论：测试结果表明，压电MEMS振动台可以实现X/Y倾斜运动，相对离轴误差仅为1%。