Abstract—

The solution of a broad range of research and applied problems of surface engineering of machine-building materials is currently one of the priorities of developing physical material science. This work considers the current state of the research and developments in surface engineering of tribomaterials with beams of charged particles and plasma flows. The main focus is on ion beam processing, vacuum arc deposition, magnetron sputtering, and hybrid ion beam-assisted deposition technologies. The physical basics of the enumerated surface engineering methods are briefly considered, their comparative analysis is made, and their most topical applications and development prospects are determined. A huge amount of empirical material has been accumulated both in the field of process methods of treatment surface engineering and in the materials science of thin surface layers. At the same time, there is a dramatic lack of fundamental ideas in understanding the physicochemical mechanisms responsible for modifications in surface structure and properties, which inevitably leads to the fragmentation of the efforts on the part of researchers and developers.

中文翻译：

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带有集中带电粒子束的摩擦材料表面工程：最先进的方法和前景

摘要—

解决机械制造材料表面工程的广泛研究和应用问题是当前物理材料科学发展的重点之一。这项工作考虑了带电粒子束和等离子流摩擦材料表面工程的研究和发展现状。主要关注离子束处理、真空电弧沉积、磁控溅射和混合离子束辅助沉积技术。简要考虑了列举的表面工程方法的物理基础，对其进行了比较分析，确定了它们最热门的应用和发展前景。在处理表面工程的工艺方法和薄表面层的材料科学领域都积累了大量的经验材料。与此同时，在理解导致表面结构和性质改变的物理化学机制方面，严重缺乏基本思想，这不可避免地导致研究人员和开发人员的努力支离破碎。