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Trimethylplatinum(IV) Complexes for MOCVD Applications: A Physicochemical Study
Russian Journal of Coordination Chemistry ( IF 1.9 ) Pub Date : 2023-08-24 , DOI: 10.1134/s1070328423600353
S. I. Dorovskikh , N. V. Kuratieva , I. V. Korolkov , T. V. Basova , I. Yu. Ilyin

Abstract

The structure of trimethylplatinum(IV) iodide [(CH3)3PtI]4 (I) (CIF file CCDC no. 22330007) is refined. The structure of the synthesized for the first time trimethylplatinum(IV) complex with tridentate N,N,O-iminoketonate [(CH3)3Pt(C9H17N2O)] (II) is determined by X-ray diffraction (XRD) (CIF file CCDC no. 22330008). The purity of the isolated phases is confirmed by elemental analysis and IR and NMR spectroscopy. The thermal behavior of complex II is studied by thermogravimetry. The energies of ionization and fragmentation of the molecules of complex II leading to the formation of the most stable fragment [(CH3)3Pt]+ are estimated by quantum-chemical calculations. Complex II is tested in the MOCVD processes. The Pt films with the pronounced (111) texture and particle sizes about 100 nm are prepared on Si plates in the presence of oxygen.



中文翻译:

用于 MOCVD 应用的三甲基铂 (IV) 配合物:物理化学研究

摘要

精制三甲基碘化铂(IV) [(CH 3 ) 3 PtI] 4 ( I )(CIF 文件 CCDC 编号 22330007)的结构。通过X射线衍射测定了首次合成的三齿N , N , O-亚氨基酮三甲基铂(IV)络合物[(CH 3 ) 3 Pt(C 9 H 17 N 2 O)]( II )的结构(XRD)(CIF 文件 CCDC 编号 22330008)。分离相的纯度通过元素分析以及红外和核磁共振光谱来确认。配合物II的热行为通过热重分析进行研究。通过量子化学计算来估计导致形成最稳定片段[(CH 3 ) 3 Pt] +的复合物II分子的电离和分裂能量。Complex II在 MOCVD 工艺中进行了测试。在氧气存在下,在 Si 板上制备了具有明显 (111) 织构和粒径约为 100 nm 的 Pt 薄膜。

更新日期:2023-08-24
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