Ultrahigh-temperature ceramics (UHTC) have a wide range of applications, particularly in supersonic aircraft vehicles. However, the production of UHTCs with predetermined mechanical parameters is relevant. The paper analyzes the structurization trends and their influence on the properties of film coatings from transition metal nitrides and borides synthesized by ion-plasma and magnetron sputtering methods. Under optimal deposition energy conditions, the films show general regularities in their formation, such as the presence of a columnar (fibrous) structure and growth texture. The average grain size varies from 18–20 nm to 60–80 nm, depending on the deposition parameters and method. The films demonstrate excellent mechanical properties, including hardness, elastic modulus, recoverable elastic indicators under load, etc. Growth directions <111> and <100> are observed for transition metal carbide and nitride coatings, while growth in direction <0001> is typical of transition metal diborides. The identified trends will allow realistic computer modeling of the film formation process, using predetermined film properties and optimal sputtering parameters to promote excellent mechanical characteristics of the surface. A thermodynamic model describing the formation of nuclei for a typical film in the environment of atoms randomly deposited onto the substrate is proposed. The critical radius for nucleus growth and, accordingly, for film crystallization is analytically estimated. The influence of Gibbs energy changes on the crystallization process is discussed within the model.

超高温陶瓷（UHTC）具有广泛的应用，特别是在超音速飞行器中。然而，具有预定机械参数的 UHTC 的生产是相关的。本文分析了离子等离子体和磁控溅射方法合成的过渡金属氮化物和硼化物的结构化趋势及其对薄膜涂层性能的影响。在最佳沉积能量条件下，薄膜在其形成中表现出一般规律，例如柱状（纤维）结构和生长纹理的存在。平均晶粒尺寸从 18–20 nm 到 60–80 nm 不等，具体取决于沉积参数和方法。该薄膜表现出优异的机械性能，包括硬度、弹性模量、负载下可恢复的弹性指标等。过渡金属碳化物和氮化物涂层的生长方向为<111>和<100>，而<0001>方向的生长是典型的。过渡金属二硼化物。所确定的趋势将允许对薄膜形成过程进行真实的计算机建模，使用预定的薄膜特性和最佳溅射参数来促进表面的优异机械特性。提出了一个热力学模型，描述在随机沉积到基板上的原子环境中典型薄膜的核形成。通过分析估计核生长的临界半径以及相应的薄膜结晶的临界半径。模型中讨论了吉布斯能量变化对结晶过程的影响。