Abstract

In this work, optical emission spectroscopy (OES) is used to investigate the effect of the magnetic field caused by permanent magnets on the 2.45 GHz argon microwave plasma discharge at low pressure. For this purpose, the characteristics of the plasma such as electron temperature and electron density have been obtained and compared in two cases, with and without the presence of magnetic field. The results show that in the argon plasma in the presence of 875 G magnetic field and at 5.4 × 10^–3 mbar pressure, the electron density and temperature reached to about 1.75 × 10¹¹ cm⁻³ and 1.4 eV, respectively. However, in the absence of the magnetic field, the obtained values for electron density and temperature are about 0.75 × 10¹¹ cm⁻³ and 0.62 eV, respectively. In fact, using the magnetic field produced by two permanent magnets, a significant increase in the density of electrons can be observed. We have compared our experimental results with numerical simulations. In this way, the microwave plasma is modeled with finite element method using COMSOL multi-physics software, which shows good agreement between simulation and experimental results.

中文翻译：

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永磁体磁场对微波放电等离子体的影响

摘要

在这项工作中，采用光学发射光谱（OES）研究了永磁体引起的磁场对低压下2.45 GHz氩微波等离子体放电的影响。为此，获得了等离子体的特性，例如电子温度和电子密度，并在存在和不存在磁场的两种情况下进行了比较。结果表明，在875 G磁场和5.4 × 10 ^–3  mbar压力下的氩等离子体中，电子密度和温度分别达到约1.75 × 10 ¹¹  cm ^-3和1.4 eV。然而，在不存在磁场的情况下，获得的电子密度和温度值分别约为0.75×10 ¹¹  cm ^-3和0.62 eV。事实上，利用两个永磁体产生的磁场，可以观察到电子密度的显着增加。我们将实验结果与数值模拟进行了比较。这样，利用COMSOL多物理场软件对微波等离子体进行有限元建模，仿真结果与实验结果吻合良好。