The external quantum efficiency (EQE) enhancement of different sized GaN micro-light-emitting diodes (μLEDs) by using localized surface plasmons (LSPs) have been studied. Silver nanoparticles (Ag NPs) are attached to the sidewalls of μLEDs by spin-coating so as to be effectively coupled with the multiple quantum well (MQW) of μLEDs and generate the LSPs. In the μLEDs with 20 × 20 μm² large mesas, the LSPs can effectively inhibit the efficiency droop. Compared to the μLED samples without the LSPs coupling, the EQE has been enhanced by about 8% at a high current density of 20,000 A/cm². This work confirms the effectiveness of the LSPs technology in improving the μLED performances, which is originally practiced only on the basal faces of conventional LEDs.

研究了利用局域表面等离子体（LSP）增强不同尺寸GaN微型发光二极管（μLED）的外量子效率（EQE）。通过旋涂将银纳米颗粒（Ag NPs）附着在μLED的侧壁上，从而与μLED的多量子阱（MQW）有效耦合并产生LSP。在20×20μm ²大台面的μLED中，LSP可以有效抑制效率下降。与没有LSP耦合的μLED样品相比，在20,000 A/cm ²的高电流密度下，EQE提高了约8% 。这项工作证实了LSP技术在提高μLED性能方面的有效性，该技术最初仅在传统LED的基面上实施。